工程设计理论、方法与技术 |
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微机电器件的稳健设计 |
杨涛, 何叶, 魏东梅, 李磊民 |
西南科技大学 信息与控制工程学院,四川 绵阳 621002 |
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Robust design for MEMS devices |
YANG Tao, HE Ye, WEI Dong-Mei, LI Lei-Min |
College of Information and Control Engineering, Southwest University of Science and Technology, Mianyang 621002, China |
引用本文:
杨涛, 何叶, 魏东梅, 李磊民. 微机电器件的稳健设计[J]. 工程设计学报, 2004, 11(3): 124-127.
YANG Tao, HE Ye, WEI Dong-Mei, LI Lei-Min. Robust design for MEMS devices[J]. Chinese Journal of Engineering Design, 2004, 11(3): 124-127.
链接本文:
https://www.zjujournals.com/gcsjxb/CN/
或
https://www.zjujournals.com/gcsjxb/CN/Y2004/V11/I3/124
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