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工程设计学报
Chinese Journal of Engineering Design  2024, Vol. 31 Issue (1): 130-136    DOI: 10.3785/j.issn.1006-754X.2024.03.311
Multidisciplinary Simulation and Optimization Design     
Research on dynamics simulation and optimization method for high-bandwidth unimorph piezoelectric deformable mirror
Kaike YANG(),Junpeng LUO,Wenjing MA,Yuanchao GENG,Deen WANG(),Qiang YUAN
Laser Fusion Research Center, China Academy of Engineering Physics, Mianyang 621900, China
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Abstract  

In order to further improve the response speed and lightweight extent of piezoelectric wavefront correctors, the dynamics simulation and optimization method of unimorph piezoelectric deformable mirrors for high dynamic shape control was studied. Firstly, based on the parameterized finite element model of unimorph piezoelectric deformable mirror, an efficient and high-precision electromechanical coupling dynamics simulation analysis method was proposed. Then, through orthogonal traversal of multi-dimensional design parameters (material type, geometric dimension and fixation mode of the optical reflector and piezoelectric ceramic), the influence of different parameters on the dynamic shape control performance of unimorph piezoelectric deformable mirrors was explored. Finally, the optimized design scheme of the unimorph piezoelectric deformable mirror with expected response bandwidth and actuation displacement performance was obtained. The experimental results show that the natural frequency and mirror actuation displacement amplitude of the developed unimorph piezoelectric deformable mirror are in line with expectations, which verifies the effectiveness of the proposed dynamics simulation and optimization method and provides a scientific theoretical method for the efficient development of high-bandwidth unimorph piezoelectric deformable mirrors.

Key words： high-bandwidth unimorph piezoelectric deformable mirror      electromechanical coupling dynamics simulation      orthogonal traversal      multi-dimensional design parameters     
Received: 20 October 2023      Published: 04 March 2024
CLC:  TH 122  
Corresponding Authors: Deen WANG     E-mail: 1411317375@qq.com;sduwde@126.com
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Kaike YANG
Junpeng LUO
Wenjing MA
Yuanchao GENG
Deen WANG
Qiang YUAN
Cite this article:

Kaike YANG,Junpeng LUO,Wenjing MA,Yuanchao GENG,Deen WANG,Qiang YUAN. Research on dynamics simulation and optimization method for high-bandwidth unimorph piezoelectric deformable mirror. Chinese Journal of Engineering Design, 2024, 31(1): 130-136.

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https://www.zjujournals.com/gcsjxb/10.3785/j.issn.1006-754X.2024.03.311     OR     https://www.zjujournals.com/gcsjxb/Y2024/V31/I1/130


高带宽压电片变形镜的动力学仿真与优化方法研究

为进一步提高压电波前校正器的响应速度和轻量化程度，对面向高动态形状控制的压电片变形镜的动力学仿真与优化方法进行了研究。首先，基于压电片变形镜的参数化有限元模型，提出了高效、高精度的电-力耦合动力学仿真分析方法。然后，通过正交遍历多维设计参数（光学反射镜与压电陶瓷的材料类型、几何尺寸和固定方式等），探究了不同参数对压电片变形镜动态形状控制性能的影响规律。最后，优化得到具有预期响应带宽和驱动位移性能的压电片变形镜设计方案，并通过制备压电片变形镜的原理样件来验证其性能。实验结果表明，所研制的压电片变形镜的固有频率和镜面驱动位移幅值符合预期，验证了所提出的动力学仿真与优化方法的有效性，这可为高带宽压电片变形镜的高效研制提供科学的理论方法。


关键词： 高带宽压电片变形镜,  电-力耦合动力学仿真,  正交遍历,  多维设计参数 
Fig.1 Schematic of working principle of unimorph piezoelectric deformable mirror
Fig.2 Geometric model and electrode layout of unimorph piezoelectric deformable mirror
Fig.3 Optimization flow for multi-dimensional design parameters of unimorph piezoelectric deformable mirror
Fig.4 Finite element model of unimorph piezoelectric deformable mirror and its actuation displacement nephogram
Fig.5 Simulated performance of unimorph piezoelectric deformable mirror corresponding to multi-dimensional design parameters
Fig.6 Actuation displacement nephogram of unimorph piezoelectric deformable mirror under single channel voltage control
Fig.7 Actuation displacement amplitude of unimorph piezoelectric deformable mirror under different excitation frequencies
Fig.8 Principle prototype of unimorph piezoelectric deformable mirror
Fig.9 Optical path for measuring surface shape of unimorph piezoelectric deformable mirror
Fig.10 Measured actuation displacement of unimorph piezoelectric deformable mirror under single channel voltage control
Fig.11 Measurement scheme for actuation displacement response speed of unimorph piezoelectric deformable mirror
Fig.12 Actuation displacement response speed at the electrode 1 of unimorph piezoelectric deformable mirror
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