Design of axial self-inductive displacement sensor based on LC parallel resonance

doi:10.3785/j.issn.1008-973X.2024.05.020

Journal of ZheJiang University (Engineering Science)

2024, Vol. 58

Issue (5): 1072-1079 DOI: 10.3785/j.issn.1008-973X.2024.05.020

Design of axial self-inductive displacement sensor based on LC parallel resonance

Hongzhou TANG(

),Jin ZHOU*(

),Chaowu JIN,Yuanping XU

College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China

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Abstract

An axial self-inductive displacement sensor based on LC parallel resonance was proposed in order to meet the development demands for higher precision in magnetic bearings. The sensitivity of the sensor was improved by increasing the rate of change of equivalent inductance in the resonance circuit. The working principle of the sensor was analyzed. The relationship between the design parameters of the sensor and its sensitivity was analyzed through finite element simulation. Then a measurement circuit for the sensor was designed, and the influence of LC parallel resonance on the sensitivity of the sensor was analyzed combined with finite element simulation and numerical simulation. An experimental setup was constructed to test the static performance of the sensor. Results show that the proposed sensor exhibits higher sensitivity and lower linearity compared with traditional displacement sensors.

Key words： displacement sensor parallel resonance measurement circuit sensitivity magnetic bearing

Received: 10 May 2023 Published: 26 April 2024

CLC:

TP 212

Fund: 国家自然科学基金资助项目（52075239, 52275537）.

Corresponding Authors: Jin ZHOU E-mail: hztang@nuaa.edu.cn;zhj@nuaa.edu.cn

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Cite this article:

Hongzhou TANG,Jin ZHOU,Chaowu JIN,Yuanping XU. Design of axial self-inductive displacement sensor based on LC parallel resonance. Journal of ZheJiang University (Engineering Science), 2024, 58(5): 1072-1079.

URL:

https://www.zjujournals.com/eng/10.3785/j.issn.1008-973X.2024.05.020 OR https://www.zjujournals.com/eng/Y2024/V58/I5/1072

基于LC并联谐振的轴向自感式位移传感器设计

为了满足磁悬浮轴承面向更高精度的发展需求，提出基于LC并联谐振的轴向自感式位移传感器. 通过增大谐振回路的等效电感变化率，提高传感器的灵敏度. 分析传感器的工作原理. 通过有限元仿真，研究传感器设计参数与灵敏度之间的关系. 设计传感器的测量电路，结合有限元仿真和数值仿真，分析LC并联谐振对传感器灵敏度的影响. 搭建实验台，对传感器的静态性能进行测试. 结果表明，相对于传统的位移传感器，提出的传感器具有更高的灵敏度与更低的线性度.

关键词： 位移传感器, 并联谐振, 测量电路, 灵敏度, 磁悬浮轴承

Fig.1 Structure diagram of axial self-sensing displacement sensor

Fig.2 Magnetic circuit diagram of sensor

Fig.3 Finite element simulation model

Tab.1 Sensor design parameters

Fig.4 Trend of inductance variation rate with rotor displacement

Fig.5 Trend of sensitivity of inductance variation with air gap length　　　　　

Fig.6 Trend of sensitivity of inductance variation with overlap length

Fig.7 Trend of sensitivity of inductance variation with excitation frequency

Fig.8 Schematic diagram of measurement circuit

Fig.9 Topology of modulation circuit

Fig.10 Parallel resonance circuit

Fig.11 Variation of output voltage with displacement at different frequencies for circuit A

Fig.12 Variation of output voltage with displacement at different frequencies for circuit B

Fig.13 Variation of output voltage with displacement at different frequencies for circuit C

Tab.2 Sensitivity and RMSE at different excitation frequencies

Fig.14 Output voltage variation characteristics at different resonant frequencies

Tab.3 Sensitivity and RMSE at different resonant frequencies

Fig.15 Inductance variation test platform

Fig.16 Trend of inductance variation rate with rotor displacement

Fig.17 Static performance test platform

Fig.18 Output characteristics of sensor

Fig.19 Hysteresis curve

Tab.4 Comparison of sensor designed in this paper with other similar sensors


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