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浙江大学学报(工学版)
浙江大学学报(工学版)  2024, Vol. 58 Issue (5): 1072-1079    DOI: 10.3785/j.issn.1008-973X.2024.05.020
机械工程     
基于LC并联谐振的轴向自感式位移传感器设计
唐洪洲(),周瑾*(),金超武,徐园平
南京航空航天大学 机电学院，江苏 南京 210016
Design of axial self-inductive displacement sensor based on LC parallel resonance
Hongzhou TANG(),Jin ZHOU*(),Chaowu JIN,Yuanping XU
College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
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摘要：

为了满足磁悬浮轴承面向更高精度的发展需求，提出基于LC并联谐振的轴向自感式位移传感器. 通过增大谐振回路的等效电感变化率，提高传感器的灵敏度. 分析传感器的工作原理. 通过有限元仿真，研究传感器设计参数与灵敏度之间的关系. 设计传感器的测量电路，结合有限元仿真和数值仿真，分析LC并联谐振对传感器灵敏度的影响. 搭建实验台，对传感器的静态性能进行测试. 结果表明，相对于传统的位移传感器，提出的传感器具有更高的灵敏度与更低的线性度.
关键词： 位移传感器;  并联谐振;  测量电路;  灵敏度;  磁悬浮轴承    
Abstract:

An axial self-inductive displacement sensor based on LC parallel resonance was proposed in order to meet the development demands for higher precision in magnetic bearings. The sensitivity of the sensor was improved by increasing the rate of change of equivalent inductance in the resonance circuit. The working principle of the sensor was analyzed. The relationship between the design parameters of the sensor and its sensitivity was analyzed through finite element simulation. Then a measurement circuit for the sensor was designed, and the influence of LC parallel resonance on the sensitivity of the sensor was analyzed combined with finite element simulation and numerical simulation. An experimental setup was constructed to test the static performance of the sensor. Results show that the proposed sensor exhibits higher sensitivity and lower linearity compared with traditional displacement sensors.
Key words: displacement sensor    parallel resonance    measurement circuit    sensitivity    magnetic bearing
收稿日期: 2023-05-10 出版日期: 2024-04-26
CLC:  TP 212  
基金资助: 国家自然科学基金资助项目（52075239, 52275537）.
通讯作者: 周瑾     E-mail: hztang@nuaa.edu.cn;zhj@nuaa.edu.cn
作者简介: 唐洪洲（1999—），男，硕士生，从事传感器技术的研究. orcid.org/0009-0007-5428-5004.E-mail：hztang@nuaa.edu.cn
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引用本文:

唐洪洲,周瑾,金超武,徐园平. 基于LC并联谐振的轴向自感式位移传感器设计[J]. 浙江大学学报(工学版), 2024, 58(5): 1072-1079.

Hongzhou TANG,Jin ZHOU,Chaowu JIN,Yuanping XU. Design of axial self-inductive displacement sensor based on LC parallel resonance. Journal of ZheJiang University (Engineering Science), 2024, 58(5): 1072-1079.

链接本文:

https://www.zjujournals.com/eng/CN/10.3785/j.issn.1008-973X.2024.05.020    或    https://www.zjujournals.com/eng/CN/Y2024/V58/I5/1072

图 1  轴向自感式位移传感器的结构图
图 2  传感器的磁路图
图 3  有限元仿真模型
参数数值
气隙长度lg/mm0.5
重叠长度lo/mm1
激励频率f/kHz25
匝数N420
磁极高度h/mm8
磁极宽度b/mm5.5
磁极轴向长度d/mm3.5
传感器外径r1/mm44
传感器内径r2/mm29.75
磁极间夹角θ/(°)23
表 1  传感器设计参数
图 4  电感变化率随转子位移的变化趋势
图 5  电感变化灵敏度随气隙长度的变化趋势
图 6  电感变化灵敏度随重叠长度的变化趋势
图 7  电感变化灵敏度随激励频率的变化趋势
图 8  测量电路的示意图
图 9  调制电路的拓扑结构
图 10  并联谐振电路
图 11  电路A在不同频率下输出电压随位移的变化
图 12  电路B在不同频率下输出电压随位移的变化
图 13  电路C在不同频率下输出电压随位移的变化
f/kHzKo/(V·mm?1)RMSE
51.36386.995×10?3
251.50651.667×10?2
501.53642.175×10?2
751.54992.432×10?2
1001.55832.602×10?2
表 2  不同激励频率下的灵敏度与RMSE
图 14  不同谐振频率下输出电压的变化特性
fres/kHzKo/(V·mm?1)RMSE
190.22791.417×10?3
200.30581.875×10?3
210.43312.618×10?3
220.67594.408×10?3
231.27411.123×10?2
表 3  不同谐振频率下的灵敏度与RMSE
图 15  电感变化测试平台
图 16  电感变化率随转子位移的变化趋势
图 17  静态性能测试平台
图 18  传感器的输出特性
图 19  迟滞性曲线
传感器类型Ko/(V·mm?1)eL/%
电涡流传感器[26]1.810.26
全桥径向电感式位移传感器[22]15.60—
全桥轴向电感式位移传感器[19]2.630.46
本文所设计的传感器24.490.23
表 4  本文所设计的传感器与其他类似传感器的比较
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