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浙江大学学报(工学版)
浙江大学学报(工学版)  2022, Vol. 56 Issue (1): 178-185    DOI: 10.3785/j.issn.1008-973X.2022.01.020
能源工程、机械工程     
光电-静电复合驱动器的驱动性能
吕振(),王新杰*(),刘亚风,赵勇筌
南京理工大学 机械工程学院, 江苏 南京 210094
Driving performance of photovoltaic-electrostatic hybrid actuator
Zhen LV(),Xin-jie WANG*(),Ya-feng LIU,Yong-quan ZHAO
School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
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摘要：

基于镧改性锆钛酸铅陶瓷(PLZT)的光电效应，提出具有倾斜下电极的新型光电-静电复合驱动器，通过闭环控制仿真研究该驱动器的驱动性能. 构建光照和光停阶段光电-静电复合驱动器的数学模型，对所构建的光生电压数学模型进行参数识别. 建立光电-静电复合驱动器输出位移的闭环控制模型，对不同辐射照度下具有不同倾斜角下电极的驱动器进行位移闭环控制仿真分析. 结果表明，当目标位移和辐射照度一致时，具有倾斜下电极结构的光电-静电复合驱动器输出位移的响应时间约为平行下电极结构的45%. 光电-静电复合驱动器输出位移的响应时间与辐射照度和下电极倾斜角成正相关变化，输出位移的控制精度与辐射照度和下电极倾斜角成反相关变化.
关键词： PLZT陶瓷;  光电-静电;  闭环控制;  倾斜下电极;  驱动器    
Abstract:

A novel photovoltaic-electrostatic hybrid actuator with a slant lower electrode was proposed based on the photovoltaic effect of lead lanthanum zirconate titanate (PLZT), and the driving performance was analyzed through the closed-loop control simulation. The mathematical model of photovoltaic-electrostatic hybrid actuator during the illumination and non-illumination phase was established, and the parameters of the mathematical model were identified. Then the closed-loop control model of the output displacement of photovoltaic-electrostatic hybrid actuator was constructed, and the displacement closed-loop control simulation analysis of actuator with different slant angles under different light intensities was conducted. Results showed that the response time of the output displacement for photovoltaic-electrostatic hybrid actuator with a slant lower electrode was about 45% of that of the parallel lower electrode in condition of the same target displacement and light intensity. The response time of the output displacement for photovoltaic-electrostatic hybrid actuator was positively correlated with the light intensity and the slant angle of the lower electrode, while the control accuracy of the output displacement was inversely correlated with the light intensity and the slant angle of the lower electrode.
Key words: PLZT ceramic    photovoltaic-electrostatic    closed-loop control    slant lower electrode    actuator
收稿日期: 2021-03-05 出版日期: 2022-01-05
CLC:  TH 122  
基金资助: 国家自然科学基金资助项目（52075263，51675282）.
通讯作者: 王新杰     E-mail: 1157069303@qq.com;xjwang@njust.edu.cn
作者简介: 吕振（1995—），男，博士生，从事智能材料与结构的研究. orcid.org/0000-0002-0781-5005. E-mail： 1157069303@qq.com
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吕振
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引用本文:

吕振,王新杰,刘亚风,赵勇筌. 光电-静电复合驱动器的驱动性能[J]. 浙江大学学报(工学版), 2022, 56(1): 178-185.

Zhen LV,Xin-jie WANG,Ya-feng LIU,Yong-quan ZHAO. Driving performance of photovoltaic-electrostatic hybrid actuator. Journal of ZheJiang University (Engineering Science), 2022, 56(1): 178-185.

链接本文:

https://www.zjujournals.com/eng/CN/10.3785/j.issn.1008-973X.2022.01.020    或    https://www.zjujournals.com/eng/CN/Y2022/V56/I1/178

图 1  具有倾斜下电极的光电-静电复合驱动器结构及受力示意图
参数 数值
扭臂宽度 w1/μm 10
扭臂厚度b/μm 10
上电极长度l/μm 1600
上电极宽度w/μm 900
上下电极最大间距h/μm 50
扭臂长度l1/μm 800
下电极倾斜角θ0/(°) 1.7
表 1  光电-静电复合驱动器结构参数
图 2  PLZT陶瓷的光-电-热-力多物理场耦合关系
图 3  光电-静电复合驱动器闭环控制模型
图 4  不同辐射照度PLZT陶瓷光生电压随时间的变化曲线
图 5  不同辐射照度PLZT陶瓷光生电压实验和拟合曲线图
图 6  光电-静电复合驱动器输出位移闭环控制的流程框图
图 7  不同驱动电压下上电极末端位移与力矩的关系
图 8  20 mW/cm2辐射照度下驱动器的位移闭环控制仿真曲线
图 9  40 mW/cm2辐射照度下驱动器的位移闭环控制仿真曲线
图 10  60 mW/cm2辐射照度下驱动器的位移闭环控制仿真曲线
E/(mW·cm?2) θ0/(°) ts/ms h/μm f/μm
20 0 295 0.5 0.9
20 1.7 135 1.0 2.2
40 0 185 0.7 1.4
40 1.7 80 1.5 3.0
60 0 135 0.9 1.8
60 1.7 65 2.3 4.7
表 2  不同辐射照度下驱动器的驱动性能
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