Design and analysis of two-dimensional precision positioning platform based on piezoelectric ceramic drive

doi:10.3785/j.issn.1006-754X.2025.04.154

Chinese Journal of Engineering Design

2025, Vol. 32

Issue (2): 199-207 DOI: 10.3785/j.issn.1006-754X.2025.04.154

Robotic and Mechanism Design

Design and analysis of two-dimensional precision positioning platform based on piezoelectric ceramic drive

Jian DU^1,²(

),Xijing ZHU^1,²(

),Jing LI^1,²

^1.School of Mechanical Engineering, North University of China, Taiyuan 030051, China
^2.Shanxi Key Laboratory of Advanced Manufacturing Technology, Taiyuan 030051, China

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Abstract

In order to solve the problems of small displacement magnification, low output stiffness and excessive motion coupling displacement of flexible precision positioning platform, a two-dimensional precision positioning platform based on piezoelectric ceramic drive is proposed. Firstly, the statics modeling for the precision positioning platform was carried out by using the module method, elastic beam theory and flexibility matrix method, and the dynamics modeling was conducted by using the Lagrange equation. Then, the finite element simulation on the displacement magnification, output stiffness, coupling displacement and natural frequency of the precision positioning platform was carried out by ANSYS Workbench software. Finally, the performance parameters of the precision positioning platform were tested by constructing an experimental device, and comparative analyses were conducted with finite element simulation results and theoretical calculation results. The simulation and experimental results verified the accuracy of the statics model and dynamics model of the precision positioning platform, which showed that the designed precision positioning platform had advantages of large displacement magnification, high output stiffness and strong decoupling performance. The research results provide some theoretical guidance for the flexible precision positioning platform to realize large stroke displacement output and excellent decoupling capability.

Key words： precision positioning platform finite element simulation natural frequency output stiffness

Received: 05 July 2024 Published: 06 May 2025

CLC:

TH 112

Corresponding Authors: Xijing ZHU E-mail: 571330085@qq.com;zxj161501@163.com

About author: DU J, ZHU X J, LI J. Design and analysis of two-dimensional precision positioning platform based on piezoelectric ceramic drive[J]. Chinese Journal of Engineering Design, 2025, 32(2): 199-207.

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Cite this article:

Jian DU,Xijing ZHU,Jing LI. Design and analysis of two-dimensional precision positioning platform based on piezoelectric ceramic drive. Chinese Journal of Engineering Design, 2025, 32(2): 199-207.

URL:

https://www.zjujournals.com/gcsjxb/10.3785/j.issn.1006-754X.2025.04.154 OR https://www.zjujournals.com/gcsjxb/Y2025/V32/I2/199

基于压电陶瓷驱动的二维精密定位平台设计及分析

为解决柔性精密定位平台位移放大倍数小、输出刚度低以及运动耦合位移过高的问题，提出了一种基于压电陶瓷驱动的二维精密定位平台。首先，利用模块法、弹性梁理论及柔度矩阵法对精密定位平台进行了静力学建模，并利用拉格朗日方程对其进行了动力学建模。然后，采用ANSYS Workbench软件对精密定位平台的位移放大倍数、输出刚度、耦合位移和固有频率进行了有限元仿真。最后，通过搭建精密定位平台实验装置来测试其性能参数，并与有限元仿真结果和理论计算结果进行了对比分析。仿真与实验结果验证了精密定位平台静力学模型及动力学模型的准确性，表明所设计的精密定位平台具有位移放大倍数大、输出刚度高及解耦性能强的优点。研究结果为柔性精密定位平台实现大行程位移输出和良好的解耦能力提供了一定的理论指导。

关键词： 精密定位平台, 有限元仿真, 固有频率, 输出刚度

Fig.1 Comparison of different bridge-type amplification mechanisms

Fig.2 Motion guidance mechanism for precision positioning platform

Fig.3 Overall structure of two-dimensional precision positioning platform

Fig.4 Dimensional parameters of double-arm bridge-type amplification mechanism

Fig.5 Dimensional parameters of motion guidance mechanism and flexible beam

Fig.6 Mass distribution schematic of precision positioning platform

参数	数值	参数	数值
$l 1$	4.00	$l ? a 2$	53.80
$l 2$	24.00	$h$	6.50
$l 3$	25.00	$t$	0.50
$l 4$	55.00	$t a$	0.60
$l 5$	21.80	$t 0$	10.00
$l 6$	63.00	$w$	2.00
$l a 1$	26.52	$b$	20.00

Table 1 Dimensional parameters of precision positioning platform

Fig.7 Motion displacement of precision positioning platform along y-direction

Fig.8 Relationship between input force and output displacement of precision positioning platform

Fig.9 The first two modes of precision positioning platform

Fig.10 Precision positioning platform prototype

Fig.11 Experimental device for precision positioning platform

Fig.12 Input and output displacement of precision positioning platform under different driving voltages

Fig.13 First-order natural frequency of precision positioning platform

Table 2 Comparison of performance parameters of precision positioning platform


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