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Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology |
Ji-jun Xiong, Shi-jun Zheng, Ying-ping Hong, Jun Li, Ying-lin Wang, Wei Wang, Qiu-lin Tan |
Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Taiyuan 030051, China; MOE Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China; The Second Research Institute of China Electronics Technology Group Corporation, Taiyuan 030024, China |
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Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology |
Ji-jun Xiong, Shi-jun Zheng, Ying-ping Hong, Jun Li, Ying-lin Wang, Wei Wang, Qiu-lin Tan |
Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Taiyuan 030051, China; MOE Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China; The Second Research Institute of China Electronics Technology Group Corporation, Taiyuan 030024, China |
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