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Front. Inform. Technol. Electron. Eng.  2013, Vol. 14 Issue (4): 274-278    DOI: 10.1631/jzus.C12MNT06
    
A trapezoidal cantilever density sensor based on MEMS technology
Li-bo Zhao, Long-qi Xu, Gui-ming Zhang, Yu-long Zhao, Xiao-po Wang, Zhi-gang Liu, Zhuang-de Jiang
State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China; MOE Key Laboratory of Thermo-Fluid Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China
A trapezoidal cantilever density sensor based on MEMS technology
Li-bo Zhao, Long-qi Xu, Gui-ming Zhang, Yu-long Zhao, Xiao-po Wang, Zhi-gang Liu, Zhuang-de Jiang
State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China; MOE Key Laboratory of Thermo-Fluid Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China
 全文: PDF 
摘要： A trapezoidal cantilever density sensor is developed based on micro-electro-mechanical systems (MEMS) technology. The sensor measures fluid density through the relationship between the density and the resonant frequency of the cantilever immersed in the fluid. To improve the sensitivity of the sensor, the modal and harmonic response analyses of trapezoidal and rectangular cantilevers are simulated by ANSYS software. The higher the resonant frequency of the cantilever immersed in the fluid, the higher the sensitivity of the sensor; the higher the resonant strain value, the easier the detection of the output signal of the sensor. Based on the results of simulation, the trapezoidal cantilever is selected to measure the densities of dimethyl silicone and toluene at the temperature ranges of 30 to 55 °C and 26 to 34 °C, respectively. Experimental results show that the trapezoidal cantilever density sensor has a good performance.
关键词： Micro-electro-mechanical systems (MEMS);  Density sensor;  Trapezoidal cantilever;  Resonant frequency    
Abstract: A trapezoidal cantilever density sensor is developed based on micro-electro-mechanical systems (MEMS) technology. The sensor measures fluid density through the relationship between the density and the resonant frequency of the cantilever immersed in the fluid. To improve the sensitivity of the sensor, the modal and harmonic response analyses of trapezoidal and rectangular cantilevers are simulated by ANSYS software. The higher the resonant frequency of the cantilever immersed in the fluid, the higher the sensitivity of the sensor; the higher the resonant strain value, the easier the detection of the output signal of the sensor. Based on the results of simulation, the trapezoidal cantilever is selected to measure the densities of dimethyl silicone and toluene at the temperature ranges of 30 to 55 °C and 26 to 34 °C, respectively. Experimental results show that the trapezoidal cantilever density sensor has a good performance.
Key words: Micro-electro-mechanical systems (MEMS)    Density sensor    Trapezoidal cantilever    Resonant frequency
收稿日期: 2012-09-24 出版日期: 2013-04-03
CLC:  TH81  
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Li-bo Zhao
Long-qi Xu
Gui-ming Zhang
Yu-long Zhao
Xiao-po Wang
Zhi-gang Liu
Zhuang-de Jiang

引用本文:

Li-bo Zhao, Long-qi Xu, Gui-ming Zhang, Yu-long Zhao, Xiao-po Wang, Zhi-gang Liu, Zhuang-de Jiang. A trapezoidal cantilever density sensor based on MEMS technology. Front. Inform. Technol. Electron. Eng., 2013, 14(4): 274-278.

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http://www.zjujournals.com/xueshu/fitee/CN/10.1631/jzus.C12MNT06    或    http://www.zjujournals.com/xueshu/fitee/CN/Y2013/V14/I4/274

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