Please wait a minute...
Journal of ZheJiang University (Engineering Science)  2026, Vol. 60 Issue (9): 1851-1861    DOI: 10.3785/j.issn.1008-973X.2026.09.002
    
Fault diagnosis of servo valve based on multi-source signal and hybrid attention
Chen YANG1,3(),Jianwen YAN1,3,*(),Lei LI2,Guishan LI3
1. School of Mechatronics Engineering, Anhui University of Science and Technology, Huainan 232001, China
2. Institute of Green Design and Manufacturing Engineering, Hefei University of Technology, Hefei 230009, China
3. Hefei Metalforming Intelligent Manufacturing Limited Company, Hefei 230601, China
Download: HTML     PDF(8012KB) HTML
Export: BibTeX | EndNote (RIS)      

Abstract  

A fault diagnosis method for electro-hydraulic servo valve based on multi-source signal fusion and hybrid attention mechanism was analyzed in order to improve the diagnostic accuracy and robustness for concealed leakage and blockage fault in electro-hydraulic servo valve under heavy-load, time-varying-speed and strong-noise condition, aiming to enhance the capability of the model for weak fault feature representation and recognition. A dual-channel multiscale Transformer fusion network for pressure and control signal, named DC-MTF-Net, was constructed oriented toward engineering application scenario. A convolutional attention module was employed to enhance multiscale temporal feature extraction, while cross-attention gated fusion was introduced to realize adaptive weighting of multi-source feature. A two-stage learning framework combining autoencoder pretraining and classification fine-tuning was adopted to improve feature representation and generalization capability in complex production environment. Multi-fault experiments conducted on an electro-hydraulic servo valve test platform under heavy-load and time-varying-speed condition showed that the proposed method improved diagnostic accuracy by at least 6%, compared with baseline models. Higher stability and robustness were demonstrated in comparative experiments involving single-channel diagnosis and various noise disturbance, verifying the effectiveness of the method in engineering application.



Key wordsheavy-load and time-varying-speed condition      electro-hydraulic servo valve      multi-source signal fusion      hybrid attention      cross-attention gated fusion     
Received: 28 October 2025      Published: 20 July 2026
CLC:  TP 181  
Fund:  国家重点研发计划资助项目(2023YEB3210805,2024YFE03120000);重点实验室开放课题资助项目(PA2024GDSK0066).
Corresponding Authors: Jianwen YAN     E-mail: 2023100049@aust.edu.cn;yanjw_hfm@163.com
Cite this article:

Chen YANG,Jianwen YAN,Lei LI,Guishan LI. Fault diagnosis of servo valve based on multi-source signal and hybrid attention. Journal of ZheJiang University (Engineering Science), 2026, 60(9): 1851-1861.

URL:

https://www.zjujournals.com/eng/10.3785/j.issn.1008-973X.2026.09.002     OR     https://www.zjujournals.com/eng/Y2026/V60/I9/1851


基于多源信号与混合注意力的伺服阀故障诊断

为了提高重载与时变速及强噪声工况下电液伺服阀泄漏和阻塞隐蔽故障的诊断精度与鲁棒性,开展基于多源信号融合与混合注意力机制的电液伺服阀故障诊断方法研究,以增强模型对弱故障特征的表征与识别能力. 面向工程应用场景,构建压力与控制信号的双通道多尺度 Transformer 融合网络(DC-MTF-Net),通过卷积注意力模块增强多尺度时序特征提取,引入交叉注意力门控融合实现多源特征的自适应加权. 采用自编码预训练与分类微调的两阶段学习框架,提升复杂生产环境下的特征表征与泛化能力. 基于重载与时变速的电液伺服阀试验平台多故障实验表明,与对比模型相比,所提方法的诊断准确率至少提高6%,在单通道诊断及多种噪声干扰对比实验下均表现出更高的稳定性和鲁棒性,验证了该方法在工程应用中的有效性.


关键词: 重载与时变速工况,  电液伺服阀,  多源信号融合,  混合注意力,  交叉注意力门控融合 
Fig.1 Fault type of electro-hydraulic servo valve in engineering practice
Fig.2 Operating principle of servo valve blockage and leakage fault
工况编号db/mmdM5/mm故障类型
#0正常
#11.0密封圈断裂
#21.8密封圈丢失+损坏
#31.5密封圈丢失
#40.6密封圈磨损
#54.04.0轻微堵塞
#62.52.5中度堵塞
#71.21.2重度堵塞
Tab.1 Failure type of electro-hydraulic servo valve
Fig.3 Structure of DC-MTF-Net model
Fig.4 Cross-attention gated fusion
Fig.5 Main configuration of servo valve fault test bench
元件型号主要参数
压力传感器HM20-2X/400-C-K35测量范围为0~40 MPa
工控机IPC-610
液压缸HSG03-100/70-H4110-600缸径为100 mm,
杆径为70 mm,
行程为0~600 mm
模拟量采集卡PCI-1713最大采集频率为10 kHz
模拟量输出卡NI PCI-6703最大输出频率为350 kHz
M5阻尼孔径为1.8、1.5、1.0、0.6 mm
纽扣式阻尼孔径为4、2.5、1.2 mm
数字量采集/
输出卡
PCI-1751U
Tab.2 Main component and key parameter of test bench
Fig.6 Acquisition and transmission of control and pressure signal
Fig.7 Local dataset of control and pressure signal
模块结构名称参数数值
编码器输入层压力/控制信号(16384,1)/ (16384,1)
一维卷积层卷积核64×4
32×4
一维最大池化层池化窗口4
卷积注意力层缩放因子4
多尺度卷积卷积核2、3、5、7
池化窗口3
深度一维卷积层卷积核5
一维卷积层卷积核3
Transformer层模型维度64
注意力头数4
前馈网络维度64
解码器一维反卷积层池化窗口128×4/128×4/64×4
全连接层输出维度128
分类器交叉注意力门控融合融合维度64
全连接层输出维度128
Tab.3 Parameter of each layer in DC-MTF-Net model
%
模型准确率
(标准差)
精确率
(标准差)
召回率
(标准差)
F1分数
(标准差)
A99.54
(±1.00)
99.55
(±0.96)
99.54
(±1.00)
99.53
(±0.99)
A193.54
(±6.02)
94.97
(±4.39)
93.54
(±6.02)
93.24
(±6.46)
A291.72
(±10.92)
91.88
(±13.14)
91.72
(±10.92)
90.43
(±12.59)
A389.14
(±16.22)
88.36
(±18.62)
89.14
(±16.22)
87.41
(±19.07)
A491.72
(±10.00)
92.53
(±11.27)
91.72
(±10.00)
90.72
(±11.40)
Tab.4 Comparison of evaluation indicator for ablation experiment
Fig.8 Model output visualization under average metrics
%
模型准确率
(标准差)
精确率
(标准差)
召回率
(标准差)
F1分数
(标准差)
A99.54
(±1.00)
99.55
(±0.96)
99.54
(±1.00)
99.53
(±0.99)
A583.37
(±3.51)
82.88
(±4.12)
83.37
(±3.51)
82.35
(±4.50)
A688.80
(±3.87)
89.98
(3.51)
88.80
(±3.87)
88.89
(±4.05)
A783.94
(±2.15)
84.78
(±1.87)
83.94
(±2.15)
83.61
(±2.48)
A884.87
(±17.32)
84.92
(±21.11)
84.87
(±17.32)
83.06
(±20.18)
A960.20
(±22.66)
59.81
(26.63)
60.20
(±22.66)
56.71
(±26.02)
A1072.75
(±15.82)
75.17
(±17.83)
72.75
(±15.82)
71.19
(±17.43)
A1177.32
(±16.32)
80.02
(±15.34)
77.32
(±16.32)
75.74
(±18.19)
Tab.5 Comparison of four evaluation metrics between DC-MTF-Net model and advanced models
Fig.9 Confusion matrix for single-signal and feature-fusion strategy
模型高斯噪声复合噪声
SNR = ?8 dBSNR = ?4 dBSNR = ?2 dBSNR = 2 dBSNR = 4 dBSNR = 8 dBλ = 0.5λ = 1λ = 2
A94.60(±1.41)97.95(±1.20)98.90(±0.70)99.91(±0.12)98.10(±2.48)98.10(±2.48)96.87(±6.84)94.49(±4.47)93.94(±7.11)
A185.13(±1.63)92.36(±2.20)95.36(±2.80)97.31(±1.77)95.20(±3.56)86.47(±16.37)93.88(±6.35)89.22(±12.98)93.94(±7.11)
A290.90(±1.54)90.00(±2.92)84.72(±13.87)88.63(±11.16)90.06(±9.02)74.03(±15.35)89.82(±8.04)82.05(±21.49)86.90(±10.93)
A383.33(±1.58)89.66(±3.98)84.72(±13.87)88.63(±11.16)90.06(±9.02)74.03(±15.35)86.80(±14.54)81.92(±12.71)85.23(±12.34)
A463.78(±1.63)68.72(±9.41)71.88(±12.78)69.89(±15.94)71.64(±14.56)74.65(±11.77)74.34(±16.39)63.68(±17.95)84.59(±12.22)
Tab.6 Model diagnostic accuracy and standard deviation under different noise intensity
[1]   陈俊翔, 姜宏达, 孔祥东, 等 考虑时滞因素的负载口独立系统模式切换平稳性研究[J]. 中国机械工程, 2025, 36 (3): 414- 425
CHEN Junxiang, JIANG Hongda, KONG Xiangdong, et al Research on smoothness of mode switch of independent metering systems considering time-delay factors[J]. China Mechanical Engineering, 2025, 36 (3): 414- 425
doi: 10.3969/j.issn.1004-132X.2025.03.005
[2]   REN T, YIN Y, WANG X, et al Leakage mechanism analysis of electro-hydraulic servo valve under transverse vibration environment[J]. Engineering Failure Analysis, 2025, 169: 109181
doi: 10.1016/j.engfailanal.2024.109181
[3]   BRANCO RAMOS FILHO J R, DE NEGRI V J. Model-based fault detection for hydraulic servo proportional valves [C]//13th Scandinavian International Conference on Fluid Power. Linköping: Linköping University Electronic Press, 2013: 389−398.
[4]   LEI Y, YANG B, JIANG X, et al Applications of machine learning to machine fault diagnosis: a review and roadmap[J]. Mechanical Systems and Signal Processing, 2020, 138: 106587
doi: 10.1016/j.ymssp.2019.106587
[5]   胡渊豪, 宋艺博, 刘家辉, 等 基于注意力卷积胶囊网络的电液比例伺服阀故障诊断[J]. 航空学报, 2024, 45 (15): 122- 131
HU Yuanhao, SONG Yibo, LIU Jiahui, et al Fault diagnosis of electro-hydraulic proportional servo valves based on attention convolutional capsule networks[J]. Acta Aeronautica et Astronautica Sinica, 2024, 45 (15): 122- 131
doi: 10.7527/S1000-6893.2024.30407
[6]   孙炜, 刘恒, 陶建峰, 等 基于IndRNN-1DLCNN的负载口独立控制阀控缸系统故障诊断[J]. 浙江大学学报: 工学版, 2023, 57 (10): 2028- 2041
SUN Wei, LIU Heng, TAO Jianfeng, et al IndRNN-1DLCNN based fault diagnosis of independent metering valve-controlled hydraulic cylinder system[J]. Journal of Zhejiang University: Engineering Science, 2023, 57 (10): 2028- 2041
doi: 10.3785/j.issn.1008-973X.2023.10.012
[7]   赵洪利, 杨佳强 基于融合卷积Transformer的航空发动机故障诊断[J]. 北京航空航天大学学报, 2025, 51 (4): 1117- 1126
ZHAO Hongli, YANG Jiaqiang Aero-engine fault diagnosis based on fusion convolutional Transformer[J]. Journal of Beijing University of Aeronautics and Astronautics, 2025, 51 (4): 1117- 1126
[8]   CHEN R, CHEN C, KELIMU M Hydraulic valve fault diagnosis based on EEWT and POA-KELM[J]. Measurement Science and Technology, 2025, 36 (1): 016147
doi: 10.1088/1361-6501/ad86d4
[9]   LI K, SUN Z, JIN H, et al Semi-supervised diagnosis method of refrigeration compressor hidden defect based on convolutional transformer autoencoder model[J]. International Journal of Refrigeration, 2024, 158: 47- 57
doi: 10.1016/j.ijrefrig.2023.10.021
[10]   LIU Z, NING H, WU M, et al A comprehensive diagnosis method of valve leakage faults based on bi-sensor information fusion[J]. Structural Health Monitoring, 2024, 23 (1): 512- 526
doi: 10.1177/14759217231174369
[11]   SHI J C, REN Y, TANG H S, et al Hydraulic directional valve fault diagnosis using a weighted adaptive fusion of multi-dimensional features of a multi-sensor[J]. Journal of Zhejiang University: Science A, 2022, 23 (4): 257- 271
doi: 10.1631/jzus.A2100394
[12]   陈俊英, 席月芸, 李朝阳 多尺度局部特征和Transformer全局学习融合的发动机剩余寿命预测[J]. 自动化学报, 2024, 50 (9): 1818- 1830
CHEN Junying, XI Yueyun, LI Zhaoyang Prediction of aeroengine remaining life by combining multi-scale local features and transformer global learning[J]. Acta Automatica Sinica, 2024, 50 (9): 1818- 1830
doi: 10.16383/j.aas.c230634
[13]   WOO S, PARK J, LEE J Y, et al. CBAM: convolutional block attention module [M/OL]. [S. l.]: Springer, 2018: 11211 [2025-06-21]. https://link.springer.com/10.1007/978-3-030-01234-2_1.
[14]   谢雯, 王若男, 羊鑫, 等 融合深度可分离卷积的多尺度残差UNet在PolSAR地物分类中的研究[J]. 电子与信息学报, 2023, 45 (8): 2975- 2985
XIE Wen, WANG Ruonan, YANG Xin, et al Research on multi-scale residual UNet fused with depthwise separable convolution in PolSAR terrain classification[J]. Journal of Electronics and Information Technology, 2023, 45 (8): 2975- 2985
doi: 10.11999/JEIT220867
[15]   GUAN H L, REN Y, TANG H H, et al Intelligent fault diagnosis methods for hydraulic components based on information fusion: review and prospects[J]. Measurement Science and Technology, 2024, 35 (8): 082001
doi: 10.1088/1361-6501/ad437e
[16]   BI C, YUE X K, DANG Z H, et al A dynamic fault diagnosis method for gravitational reference sensor based on informer-RS[J]. IEEE Sensors Journal, 2025, 25 (2): 3982- 3997
doi: 10.1109/JSEN.2024.3510739
[17]   LEE S, KIM Y, CHOI H J, et al Uncertainty-aware fault diagnosis of rotating compressors using dual-graph attention networks[J]. Machines, 2025, 13 (8): 673
doi: 10.3390/machines13080673
[18]   ZHU X C, RUAN Q S, QIAN S, et al A hybrid model based on transformer and mamba for enhanced sequence modeling[J]. Scientific Reports, 2025, 15 (1): 11428
doi: 10.1038/s41598-025-87574-8
[1] Minghua ZHAO,Yuxuan LYU,Jiahao LYU,Yifei CHEN,Cheng SHI,Jing HU. Video anomaly detection based on multi-scale appearance and motion fusion[J]. Journal of ZheJiang University (Engineering Science), 2026, 60(8): 1730-1738.