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浙江大学学报(工学版)
J4  2012, Vol. 46 Issue (8): 1375-1381    DOI: 10.3785/j.issn.1008-973X.2012.08.004
    
Dynamic analysis and testing of micro/nano-positioning platform
LIN Chao, YU Song-song, CHENG Kai, Cui Xin-hui, TAO You-tao,WANG Jing-chao
The State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing 400030, China
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Abstract  

In order to analyze the dynamic performances of the micro/nano-positioning platform, the dynamic model of the 5-degreeoffreedom micro/nano-positioning platform was established with Lagrange equation, then the analytical formulas of natural frequencies and step responses of the platform were deduced. Based on finite element method, the top five-order natural frequencies and mode shapes were obtained. Furthermore, the static and dynamic performances testing were completed under different driving frequencies and load conditions. The results indicate that the open-loop setting time is 0.812 s, the resonance phenomenon occurs when the driving frequency is 100 Hz, and the stability of the platform is superb if the load is less than 10 N. Meanwhile, the resolutions of the piezoelectric actuator, the capacitance sensor and the platform by dynamic testing are 4nm, 10nm and 45nm respectively, and the repeated accuracy of positioning of the platform is 0.6 μm.

Published: 23 September 2012
CLC:  TH 139  
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LIN Chao, YU Song-song, CHENG Kai, Cui Xin-hui, TAO You-tao,WANG Jing-chao. Dynamic analysis and testing of micro/nano-positioning platform. J4, 2012, 46(8): 1375-1381.

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http://www.zjujournals.com/eng/10.3785/j.issn.1008-973X.2012.08.004     OR     http://www.zjujournals.com/eng/Y2012/V46/I8/1375


微/纳米定位平台的动态特性分析与试验

为了分析微/纳传动平台的动态特性,应用拉格朗日方程,建立5自由度微/纳米定位平台的动力学模型,推导出固有频率及阶跃响应的解析式.采用有限元方法,仿真得到平台的前5阶固有频率和模态阵型.在不同驱动频率和不同加载下,分别进行静、动态试验,结果表明,平台的开环调节时间为0.812 s；驱动频率为100 Hz时,发生共振现象；加载小于10 N时,平台具有较好的稳定性；动态试验得到压电陶瓷、电容传感器和平台的分辨率分别为4、10和45 nm,且平台的重复定位精度为0.6 μm.

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