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浙江大学学报(工学版)  2026, Vol. 60 Issue (9): 1851-1861    DOI: 10.3785/j.issn.1008-973X.2026.09.002
机械工程     
基于多源信号与混合注意力的伺服阀故障诊断
杨晨1,3(),严建文1,3,*(),李磊2,李贵闪3
1. 安徽理工大学 机电工程学院,安徽 淮南 232001
2. 合肥工业大学 绿色设计与制造工程研究所,安徽 合肥 230009
3. 合肥合锻智能制造股份有限公司,安徽 合肥 230601
Fault diagnosis of servo valve based on multi-source signal and hybrid attention
Chen YANG1,3(),Jianwen YAN1,3,*(),Lei LI2,Guishan LI3
1. School of Mechatronics Engineering, Anhui University of Science and Technology, Huainan 232001, China
2. Institute of Green Design and Manufacturing Engineering, Hefei University of Technology, Hefei 230009, China
3. Hefei Metalforming Intelligent Manufacturing Limited Company, Hefei 230601, China
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摘要:

为了提高重载与时变速及强噪声工况下电液伺服阀泄漏和阻塞隐蔽故障的诊断精度与鲁棒性,开展基于多源信号融合与混合注意力机制的电液伺服阀故障诊断方法研究,以增强模型对弱故障特征的表征与识别能力. 面向工程应用场景,构建压力与控制信号的双通道多尺度 Transformer 融合网络(DC-MTF-Net),通过卷积注意力模块增强多尺度时序特征提取,引入交叉注意力门控融合实现多源特征的自适应加权. 采用自编码预训练与分类微调的两阶段学习框架,提升复杂生产环境下的特征表征与泛化能力. 基于重载与时变速的电液伺服阀试验平台多故障实验表明,与对比模型相比,所提方法的诊断准确率至少提高6%,在单通道诊断及多种噪声干扰对比实验下均表现出更高的稳定性和鲁棒性,验证了该方法在工程应用中的有效性.

关键词: 重载与时变速工况电液伺服阀多源信号融合混合注意力交叉注意力门控融合    
Abstract:

A fault diagnosis method for electro-hydraulic servo valve based on multi-source signal fusion and hybrid attention mechanism was analyzed in order to improve the diagnostic accuracy and robustness for concealed leakage and blockage fault in electro-hydraulic servo valve under heavy-load, time-varying-speed and strong-noise condition, aiming to enhance the capability of the model for weak fault feature representation and recognition. A dual-channel multiscale Transformer fusion network for pressure and control signal, named DC-MTF-Net, was constructed oriented toward engineering application scenario. A convolutional attention module was employed to enhance multiscale temporal feature extraction, while cross-attention gated fusion was introduced to realize adaptive weighting of multi-source feature. A two-stage learning framework combining autoencoder pretraining and classification fine-tuning was adopted to improve feature representation and generalization capability in complex production environment. Multi-fault experiments conducted on an electro-hydraulic servo valve test platform under heavy-load and time-varying-speed condition showed that the proposed method improved diagnostic accuracy by at least 6%, compared with baseline models. Higher stability and robustness were demonstrated in comparative experiments involving single-channel diagnosis and various noise disturbance, verifying the effectiveness of the method in engineering application.

Key words: heavy-load and time-varying-speed condition    electro-hydraulic servo valve    multi-source signal fusion    hybrid attention    cross-attention gated fusion
收稿日期: 2025-10-28 出版日期: 2026-07-20
CLC:  TP 181  
基金资助: 国家重点研发计划资助项目(2023YEB3210805,2024YFE03120000);重点实验室开放课题资助项目(PA2024GDSK0066).
通讯作者: 严建文     E-mail: 2023100049@aust.edu.cn;yanjw_hfm@163.com
作者简介: 杨晨(1997—),男,博士生,从事液压机系统故障运维研究. orcid.org/0009-0004-5311-1393. E-mail:2023100049@aust.edu.cn
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引用本文:

杨晨,严建文,李磊,李贵闪. 基于多源信号与混合注意力的伺服阀故障诊断[J]. 浙江大学学报(工学版), 2026, 60(9): 1851-1861.

Chen YANG,Jianwen YAN,Lei LI,Guishan LI. Fault diagnosis of servo valve based on multi-source signal and hybrid attention. Journal of ZheJiang University (Engineering Science), 2026, 60(9): 1851-1861.

链接本文:

https://www.zjujournals.com/eng/CN/10.3785/j.issn.1008-973X.2026.09.002        https://www.zjujournals.com/eng/CN/Y2026/V60/I9/1851

图 1  工程实践中的电液伺服阀故障类型
图 2  伺服阀堵塞和泄漏故障的运行原理
工况编号db/mmdM5/mm故障类型
#0正常
#11.0密封圈断裂
#21.8密封圈丢失+损坏
#31.5密封圈丢失
#40.6密封圈磨损
#54.04.0轻微堵塞
#62.52.5中度堵塞
#71.21.2重度堵塞
表 1  电液伺服阀的失效类型
图 3  DC-MTF-Net模型的结构
图 4  交叉注意力门控融合
图 5  伺服阀故障实验台的主要配置
元件型号主要参数
压力传感器HM20-2X/400-C-K35测量范围为0~40 MPa
工控机IPC-610
液压缸HSG03-100/70-H4110-600缸径为100 mm,
杆径为70 mm,
行程为0~600 mm
模拟量采集卡PCI-1713最大采集频率为10 kHz
模拟量输出卡NI PCI-6703最大输出频率为350 kHz
M5阻尼孔径为1.8、1.5、1.0、0.6 mm
纽扣式阻尼孔径为4、2.5、1.2 mm
数字量采集/
输出卡
PCI-1751U
表 2  试验台的主要元件及主要参数
图 6  控制与压力信号的采集及传递
图 7  控制和压力信号的局部数据集
模块结构名称参数数值
编码器输入层压力/控制信号(16384,1)/ (16384,1)
一维卷积层卷积核64×4
32×4
一维最大池化层池化窗口4
卷积注意力层缩放因子4
多尺度卷积卷积核2、3、5、7
池化窗口3
深度一维卷积层卷积核5
一维卷积层卷积核3
Transformer层模型维度64
注意力头数4
前馈网络维度64
解码器一维反卷积层池化窗口128×4/128×4/64×4
全连接层输出维度128
分类器交叉注意力门控融合融合维度64
全连接层输出维度128
表 3  DC-MTF-Net模型的各层参数
%
模型准确率
(标准差)
精确率
(标准差)
召回率
(标准差)
F1分数
(标准差)
A99.54
(±1.00)
99.55
(±0.96)
99.54
(±1.00)
99.53
(±0.99)
A193.54
(±6.02)
94.97
(±4.39)
93.54
(±6.02)
93.24
(±6.46)
A291.72
(±10.92)
91.88
(±13.14)
91.72
(±10.92)
90.43
(±12.59)
A389.14
(±16.22)
88.36
(±18.62)
89.14
(±16.22)
87.41
(±19.07)
A491.72
(±10.00)
92.53
(±11.27)
91.72
(±10.00)
90.72
(±11.40)
表 4  消融实验的评价指标对比
图 8  平均指标下的模型输出可视化
%
模型准确率
(标准差)
精确率
(标准差)
召回率
(标准差)
F1分数
(标准差)
A99.54
(±1.00)
99.55
(±0.96)
99.54
(±1.00)
99.53
(±0.99)
A583.37
(±3.51)
82.88
(±4.12)
83.37
(±3.51)
82.35
(±4.50)
A688.80
(±3.87)
89.98
(3.51)
88.80
(±3.87)
88.89
(±4.05)
A783.94
(±2.15)
84.78
(±1.87)
83.94
(±2.15)
83.61
(±2.48)
A884.87
(±17.32)
84.92
(±21.11)
84.87
(±17.32)
83.06
(±20.18)
A960.20
(±22.66)
59.81
(26.63)
60.20
(±22.66)
56.71
(±26.02)
A1072.75
(±15.82)
75.17
(±17.83)
72.75
(±15.82)
71.19
(±17.43)
A1177.32
(±16.32)
80.02
(±15.34)
77.32
(±16.32)
75.74
(±18.19)
表 5  DC-MTF-Net模型与先进模型的4种评价指标对比
图 9  单一信号和特征融合策略下的混淆矩阵
模型高斯噪声复合噪声
SNR = ?8 dBSNR = ?4 dBSNR = ?2 dBSNR = 2 dBSNR = 4 dBSNR = 8 dBλ = 0.5λ = 1λ = 2
A94.60(±1.41)97.95(±1.20)98.90(±0.70)99.91(±0.12)98.10(±2.48)98.10(±2.48)96.87(±6.84)94.49(±4.47)93.94(±7.11)
A185.13(±1.63)92.36(±2.20)95.36(±2.80)97.31(±1.77)95.20(±3.56)86.47(±16.37)93.88(±6.35)89.22(±12.98)93.94(±7.11)
A290.90(±1.54)90.00(±2.92)84.72(±13.87)88.63(±11.16)90.06(±9.02)74.03(±15.35)89.82(±8.04)82.05(±21.49)86.90(±10.93)
A383.33(±1.58)89.66(±3.98)84.72(±13.87)88.63(±11.16)90.06(±9.02)74.03(±15.35)86.80(±14.54)81.92(±12.71)85.23(±12.34)
A463.78(±1.63)68.72(±9.41)71.88(±12.78)69.89(±15.94)71.64(±14.56)74.65(±11.77)74.34(±16.39)63.68(±17.95)84.59(±12.22)
表 6  不同噪声强度下的模型诊断准确率及标准差
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