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J4  2012, Vol. 46 Issue (7): 1175-1181    DOI: 10.3785/j.issn.1008-973X.2012.07.004
西安交通大学 机械制造系统工程国家重点实验室,陕西 西安 710049
Effects of mold geometries and initial thickness
on resist filling characteristics in UV-NIL
DU Jun, WEI Zheng-ying, XIONG Xiao-dong, HE Wei, TANG Yi-ping
State Key Laboratory of Manufacturing System Engineering, Xi’an Jiaotong University, Xi’an 710049, China
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A numerical model based on the computational fluid dynamics was conducted to predict the resist filling process in order to reveal the influence rules of the duty ratio of the recessed groove and the initial thickness of resist on resist filling properties. Surface tension and contact angle were considered in the model. The effects of the duty ratio of the recessed groove and the initial thickness of resist on cross-sectional profile of the imprinted resist were analyzed. Results showed that when the initial thickness of resist maintained a fixed value, the recessed groove would be more frequently filled by double-peak mode as the depth-to-width ratio of the recessed groove decreased, and the migrating position of the peak of crosssectional profile along horizontal direction changed in ladderlike way. There was the conversion of filling mode with decreasing the initial thickness of resist. The change rate of filling ratio against filling time under double-peak mode showed obviously nonlinear characteristics. By analyzing the thickness-to-width ratio of the recessed groove, the critical value of conversion from singlepeak mode to doublepeak mode was determined, which was between 5∶8 and 2∶3.

出版日期: 2012-07-01
:  O 359  


通讯作者: 魏正英, 女, 教授.     E-mail:
作者简介: 杜军(1978-), 男, 博士生, 从事微器件开发的研究. E-mail:
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杜军,魏正英,熊孝东,何威,唐一平. 纳米压印模具及膜厚对抗蚀剂填充特性的影响[J]. J4, 2012, 46(7): 1175-1181.

DU Jun, WEI Zheng-ying, XIONG Xiao-dong, HE Wei, TANG Yi-ping. Effects of mold geometries and initial thickness
on resist filling characteristics in UV-NIL. J4, 2012, 46(7): 1175-1181.


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