光学工程 |
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椭偏参数测量误差对薄膜参数测试精度的影响 |
林远芳, 黄强盛, 茹启田, 孙硕, 郑晓东 |
浙江大学 光电信息工程学系,浙江 杭州 310027 |
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Impact of ellipsometric parameters measurement error on measurement accuracy of thin film parameters |
LIN Yuan-fang, HUANG Qiang-sheng, RU Qi-tian, SUN Shuo, ZHENG Xiao-dong |
Department of Optical Engineering, Zhejiang University, Hangzhou 310027, China |
引用本文:
林远芳, 黄强盛, 茹启田, 孙硕, 郑晓东. 椭偏参数测量误差对薄膜参数测试精度的影响[J]. J4, 2011, 45(8): 1485-1489.
LIN Yuan-fang, HUANG Qiang-sheng, RU Qi-tian, SUN Shuo, ZHENG Xiao-dong. Impact of ellipsometric parameters measurement error on measurement accuracy of thin film parameters. J4, 2011, 45(8): 1485-1489.
链接本文:
https://www.zjujournals.com/eng/CN/10.3785/j.issn.1008-973X.2011.08.027
或
https://www.zjujournals.com/eng/CN/Y2011/V45/I8/1485
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