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浙江大学学报(工学版)
浙江大学学报(工学版)  2019, Vol. 53 Issue (11): 2058-2066    DOI: 10.3785/j.issn.1008-973X.2019.11.002
机械工程     
大尺寸板状构件超声阵列悬浮技术
武二永1(),韩烨1,2,李立强1,邓双1,杨克己1
1. 浙江大学 流体动力与机电系统国家重点实验室，浙江 杭州 310027
2. 中石化长输油气管道检测有限公司，江苏 徐州 221008
Ultrasonic array levitation technology for large size plate like components
Er-yong WU1(),Ye HAN1,2,Li-qiang LI1,Shuang DENG1,Ke-ji YANG1
1. State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, China
2. SINOPEC Long-distance Oil and Gas Pipeline Inspection Co. Ltd, Xuzhou 221008, China
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摘要：

为了提高超声悬浮性能及其柔性化应用能力，满足包括集成电路硅片和太阳能电池极板等构件的非接触抓取和输运的应用需求，开展基于换能器阵列的大尺寸板状构件超声悬浮技术研究. 采用空间脉冲响应函数法，建立换能器阵列非自由超声场的声压分布及该声场内悬浮体所受声辐射力的理论表达式，结合COMSOL软件进行仿真研究，验证该理论表达式的正确性. 搭建基于换能器阵列的超声悬浮实验装置，分别开展同一激励电压不同尺寸硅片以及同一尺寸硅片不同激励电压下的声悬浮实验. 结果表明：该技术可以实现对尺寸远大于波长的物体在稳定高度的超声悬浮，且当悬浮体的重量小于超声阵列的最大负载能力时，悬浮高度随物体尺寸和激励电压的变化不明显.
关键词： 大尺寸板状构件;  换能器阵列;  超声悬浮;  声场控制;  声辐射力    
Abstract:

In order to increase the ultrasonic levitation performance and its flexible application ability, and satisfy the noncontact grasping and transportation application requirements for the components including but not limited to integrated circuit silicon wafer and solar cell plate, a ultrasonic levitation technology based on the transducer array for large size plate like components was studied. Using the spatial impulse response method, the theoretical expressions for transducer array’s sound pressure distribution in non-free ultrasonic field and the acoustic radiation force at levitated object were established. These theoretical expressions’ correctness was verified by simulation results of COMSOL software. The ultrasonic levitation experimental device based on the transducer array was set up, and the acoustic levitation experiments for variable size silicon wafer under the same excited voltage and fixed size silicon wafer under variable excited voltages were carried out. Experimental results show that the proposed technology can realize stable height ultrasonic levitation of object whose size is far larger than the wavelength, and when the levitated object’s weight is less than the ultrasonic array maximum load capacity, the levitation height is not obvious related to the object size and the excited voltage.
Key words: large size plate like component    transducer array    ultrasonic levitation    acoustic field control    acoustic radiation force
收稿日期: 2019-04-11 出版日期: 2019-11-21
CLC:  TB 553  
基金资助: 国家自然科学基金资助项目（51675480，51175465）
作者简介: 武二永（1980—），男，讲师，从事超声工程及其应用研究. orcid.org/0000-0003-0786-9756. E-mail： wueryong@zju.edu.cn
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武二永
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李立强
邓双
杨克己

引用本文:

武二永,韩烨,李立强,邓双,杨克己. 大尺寸板状构件超声阵列悬浮技术[J]. 浙江大学学报(工学版), 2019, 53(11): 2058-2066.

Er-yong WU,Ye HAN,Li-qiang LI,Shuang DENG,Ke-ji YANG. Ultrasonic array levitation technology for large size plate like components. Journal of ZheJiang University (Engineering Science), 2019, 53(11): 2058-2066.

链接本文:

http://www.zjujournals.com/eng/CN/10.3785/j.issn.1008-973X.2019.11.002    或    http://www.zjujournals.com/eng/CN/Y2019/V53/I11/2058

图 1  圆形换能器阵元声场计算坐标
图 2  自由空间内超声阵列空间脉冲响应计算模型
图 3  平面反射作用下实际与虚拟声源的y-z平面分布
图 4  单换能器阵元的自由声场仿真模型
图 5  单换能器阵元的自由声场仿真结果
图 6  自由空间和存在悬浮体的声场仿真结果
图 7  声悬浮仿真简化模型
图 8  不同悬浮高度下的声场分布
图 9  归一化悬浮力与悬浮高度之间的关系
图 10  基于换能器阵列的超声悬浮实验装置
图 11  悬浮高度与硅片尺寸之间的关系
图 12  非规则外形硅片的超声悬浮实验结果
图 13  硅片悬浮高度随激励电压变化的实验结果
图 14  超声阵列悬浮能力与激励电压之间关系的实验结果
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