无线电电子学、电信技术 |
|
|
|
|
氩等离子体诱导量子阱混合技术 |
彭盛华, 张欣, 何建军 |
浙江大学 现代光学仪器国家重点实验室,浙江 杭州 310027 |
|
Argon plasma induced quantum well intermixing technology |
PENG Sheng-hua, ZHANG Xin, HE Jian-jun |
State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China |
[1] MARSH J H, KOWALSKI O P. Quantum well intermixing in material systems for 1.5 um (invited) [J]. The Journal of Vacuum Science and Technology A, 1998, 16(2) : 810-816. [2] CHARBONNEAU S, KOTELES E S, HE J J, et al. Photonic integrated circuits fabricated using ion implantation [J]. IEEE JSTQE, 1998, 4(4): 772-793. [3] 黄晓东, 黄德修, 刘雪峰. SiO2膜增强InGaAsP超晶格外延片的量子阱混合[J]. 半导体学报, 2000, 21(11) : 1107-1110. HUANG Xiaodong, HUANG Dexiu, LIU Xuefeng. SiO2 encapsulant enhanced quantum well intermixing for InGaAsP superlattice[J]. Chinese Journal of Semiconductors, 2000, 21(11): 1107-1110. [4] KOWALSKI O P, MARSH J H. A universal damage induced technique for quantum well intermixing [J]. Applied Physics Letters, 1998, 72(5): 581-583. [5] OOI B S, MCILVANEY K, MARSH J H. Selective quantum well intermixing in GaAs/AlGaAs structures using impurity free vacancy diffusion [J]. IEEE Journal of Quantum Electronics, 1997, 33(10): 1784-1793. [6] DJIE H S, MEI T. Plasma Induced quantum well intermixing for photonic integration[J]. IEEE JSTQE, 2005, 11(2): 373-382. [7] NIE D, MEI T. Argon plasma exposure enhanced intermixing in undoped InGaAsP/InP QW structure [J]. Journal of Applied Physics, 2006, 100(4): 46103 [8] 黄晓东,黄德修,刘雪峰.InGaAsP四元系量子阱材料的热稳定性[J].华中理工大学学报, 1999,27 (10): 36-39. HUANG Xiaodong, HUANG Dexiu, LIU Xuefeng. Thermal stability of InGaAsP quaternary quantum wells materials [J]. Journal of Huazhong University of Science and Technology, 1999, 27(10): 36-39. [9] DJIE H S, AROKIARIAJ J, MEI T. Experimental and theoretical analysis of Argon plasma enhanced quantum well intermixing [J]. IEEE Journal of Quantum Electronics, 2004, 40(2): 166-174. |
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
|
Shared |
|
|
|
|
|
Discussed |
|
|
|
|