MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

doi:10.3785/j.issn.1008-973X.2019.09.019

Journal of ZheJiang University (Engineering Science)

2019, Vol. 53

Issue (9): 1795-1804 DOI: 10.3785/j.issn.1008-973X.2019.09.019

Communication Technology, Electrical Engineering

MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

Yi-yu LIN(

),Xu-dong ZHENG*(

),Hai-bin WU,Zhi-peng MA,Zhong-he JIN

Micro-satellite Research Center, Zhejiang University, Hangzhou 310027, China

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Abstract

A novel drive-mode control scheme for MEMS gyroscopes was presented, where the gyroscopes were parametrically excited with constant resonant frequency. The proposed control scheme enabled a constant resonant frequency excitation with parametric amplification in the drive mode via triangular parallel capacitors, to keep the resonant frequency and quality factor constant against environmental fluctuations, and to improve the gyroscope temperature performance. First, frequency tuning and parametric excitation by means of triangular capacitors were introduced. Then, a new control scheme based on parametric excitation at constant frequency was proposed and implemented. The simulation results indicate that the resonant frequency is tuned to be constant and the dive-mode vibration amplitude is controlled to be stable. Finally, the experimental results indicate that the bias instability of gyroscope was 1.69°/h, which was better than that of the traditional scheme, and the temperature drift of zero-rate output during temperature cooling down was reduced to half compared to the traditional control scheme.

Key words： MEMS gyroscope drive-mode control parametric excitation constant resonance frequency drive triangular parallel capacitors

Received: 13 December 2018 Published: 12 September 2019

CLC:

U 666.12

Corresponding Authors: Xu-dong ZHENG E-mail: linyy@zju.edu.cn;zhengxudong@zju.edu.cn

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	Yi-yu LIN
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	Hai-bin WU
	Zhi-peng MA
	Zhong-he JIN

Cite this article:

Yi-yu LIN,Xu-dong ZHENG,Hai-bin WU,Zhi-peng MA,Zhong-he JIN. MEMS gyroscopes parametric excitation control scheme with constant resonant frequency. Journal of ZheJiang University (Engineering Science), 2019, 53(9): 1795-1804.

URL:

http://www.zjujournals.com/eng/10.3785/j.issn.1008-973X.2019.09.019 OR http://www.zjujournals.com/eng/Y2019/V53/I9/1795

采用恒频参量激励的微机械陀螺驱动控制方案

提出一种基于恒定谐振频率和参量激励的微机械(MEMS)陀螺驱动控制方案. 该方案利用三角形栅极电容实现，使得陀螺驱动谐振频率和品质因子在环境波动下保持恒定，改善陀螺的温度敏感性. 介绍基于三角形栅极电容的频率调谐和参量激励理论，提出并实现新型恒定谐振频率和参量激励驱动方案. 仿真结果表明，对陀螺驱动模态的实时调谐使得谐振频率恒定；参量激励实现了对驱动模态的稳幅控制. 实验结果表明，该方案测得的陀螺的Allan方差偏置不稳定性为1.69°/h，优于传统方案；降温过程中零偏温漂相比传统方案减小了50%.

关键词： 微机械(MEMS)陀螺, 驱动控制方案, 参量激励, 恒谐振频率驱动, 三角形栅极电容

Fig.1 Schematic diagram of slot-structure gyrosocpe

Fig.2 Blocks of traditional PLL-AGC control scheme and novel CRF-PE control scheme

Fig.3 Simulation of CRF-PE control model

Tab.1 Simulation parameters of CRF-PE control scheme

Fig.4 Simulation results of CRF-PE control scheme

Fig.5 Photo of experimental platform for CRF-PE control

Fig.6 Drive-mode one-hour stability test under CRF-PE control

Fig.7 45-minite data of direct current component and amplitude of alternating current component under CRF-PE control

Fig.8 Comparison of Allan variance graphs of gyroscope outputs using novel CRF-PE control scheme and conventional PLL-AGC control scheme

Fig.9 Comparison of zero-rate outputs using novel CRF-PE control scheme and conventional PLL-AGC control scheme during temperature cooling down


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