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浙江大学学报(工学版)
浙江大学学报(工学版)  2019, Vol. 53 Issue (9): 1795-1804    DOI: 10.3785/j.issn.1008-973X.2019.09.019
通信技术、电气工程     
采用恒频参量激励的微机械陀螺驱动控制方案
林一羽(),郑旭东*(),吴海斌,马志鹏,金仲和
浙江大学 微小卫星研究中心，浙江 杭州 310027
MEMS gyroscopes parametric excitation control scheme with constant resonant frequency
Yi-yu LIN(),Xu-dong ZHENG*(),Hai-bin WU,Zhi-peng MA,Zhong-he JIN
Micro-satellite Research Center, Zhejiang University, Hangzhou 310027, China
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摘要：

提出一种基于恒定谐振频率和参量激励的微机械(MEMS)陀螺驱动控制方案. 该方案利用三角形栅极电容实现，使得陀螺驱动谐振频率和品质因子在环境波动下保持恒定，改善陀螺的温度敏感性. 介绍基于三角形栅极电容的频率调谐和参量激励理论，提出并实现新型恒定谐振频率和参量激励驱动方案. 仿真结果表明，对陀螺驱动模态的实时调谐使得谐振频率恒定；参量激励实现了对驱动模态的稳幅控制. 实验结果表明，该方案测得的陀螺的Allan方差偏置不稳定性为1.69°/h，优于传统方案；降温过程中零偏温漂相比传统方案减小了50%.
关键词： 微机械(MEMS)陀螺;  驱动控制方案;  参量激励;  恒谐振频率驱动;  三角形栅极电容    
Abstract:

A novel drive-mode control scheme for MEMS gyroscopes was presented, where the gyroscopes were parametrically excited with constant resonant frequency. The proposed control scheme enabled a constant resonant frequency excitation with parametric amplification in the drive mode via triangular parallel capacitors, to keep the resonant frequency and quality factor constant against environmental fluctuations, and to improve the gyroscope temperature performance. First, frequency tuning and parametric excitation by means of triangular capacitors were introduced. Then, a new control scheme based on parametric excitation at constant frequency was proposed and implemented. The simulation results indicate that the resonant frequency is tuned to be constant and the dive-mode vibration amplitude is controlled to be stable. Finally, the experimental results indicate that the bias instability of gyroscope was 1.69°/h, which was better than that of the traditional scheme, and the temperature drift of zero-rate output during temperature cooling down was reduced to half compared to the traditional control scheme.
Key words: MEMS gyroscope    drive-mode control    parametric excitation    constant resonance frequency drive    triangular parallel capacitors
收稿日期: 2018-12-13 出版日期: 2019-09-12
CLC:  U 666.12  
通讯作者: 郑旭东     E-mail: linyy@zju.edu.cn;zhengxudong@zju.edu.cn
作者简介: 林一羽（1992—），女，博士生，从事微机械陀螺数字信号处理研究. orcid.org/0000-0002-9827-5955. E-mail： linyy@zju.edu.cn
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林一羽
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金仲和

引用本文:

林一羽,郑旭东,吴海斌,马志鹏,金仲和. 采用恒频参量激励的微机械陀螺驱动控制方案[J]. 浙江大学学报(工学版), 2019, 53(9): 1795-1804.

Yi-yu LIN,Xu-dong ZHENG,Hai-bin WU,Zhi-peng MA,Zhong-he JIN. MEMS gyroscopes parametric excitation control scheme with constant resonant frequency. Journal of ZheJiang University (Engineering Science), 2019, 53(9): 1795-1804.

链接本文:

http://www.zjujournals.com/eng/CN/10.3785/j.issn.1008-973X.2019.09.019    或    http://www.zjujournals.com/eng/CN/Y2019/V53/I9/1795

图 1  栅结构微机械结构示意图
图 2  传统PLL-AGC控制方案和新型CRF-PE控制方案的框图
图 3  CRF-PE控制方案仿真模型
参数 数值 单位 参数 数值 单位
f0 1 835.91 Hz Q0 8 000 —
mx 1.56×10?5 kg KVF 7.828×10?6 N/V
kx 2 075.800 N/m KXV 1×105 V/m
cx 2.25×10?5 — KT 0.038 N/（m?V2）
表 1  CRF-PE控制方案的仿真参数
图 4  CRF-PE控制方案仿真结果
图 5  CRF-PE控制方案的实验平台照片
图 6  CRF-PE控制方案1 h驱动稳定性测试
图 7  CRF-PE控制方案中直流分量和交流分量幅度的45 min数据
图 8  新型CRF-PE控制方案和传统PLL-AGC控制方案的陀螺零偏输出的Allan方差对比曲线
图 9  降温过程中新型CRF-PE控制方案和传统PLL-AGC控制方案的零偏数据对比
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