Please wait a minute...
浙江大学学报(工学版)
机械工程     
基于晶圆优先级的连续型Interbay搬运系统性能分析
周炳海, 陈锦祥, 赵猛
同济大学 机械与能源工程学院,上海 201804
Performance analysis for continuous flow transporters of Interbay AMHS with priority rules
ZHOU Bing-hai, CHEN Jin-xiang, ZHAO Meng
College of Mechanical Engineering, Tongji University, Shanghai 201804, China
 全文: PDF(1776 KB)   HTML
摘要:

为了快速、有效地评价基于晶圆优先级的连续型Interbay自动物料搬运系统的性能,采用基于排队论的方法构建了性能分析模型.在建模过程中,为了使搬运路径多样化,引入了带外环和捷径的脊背式搬运系统.通过控制晶圆进入外环与捷径的优先级,实现了较高优先级的晶圆能快到达目的地.考虑服务时间变动性,引用相关满足系统排队实际的排队模型,构建系统期望在制品的数学表达.在相同的实验条件下,通过分析性能分析模型与Arena仿真模型得到的系统在制品量,验证本文提出的性能分析模型的准确性.实验结果表明,任何情形下的绝对误差都控制在5%以下,性能分析模型完全能满足系统性能评价的要求.

Abstract:

To quickly and effectively estimate the performance of automated material handling systems based on wafer priority rules, queuing-based methods were applied to structure the performance analytical model. In the modeling procedure, to make the diversity of material handling routes, a spine layout of material handling systems with crossovers and an outer ring was introduced. Through controlling the wafer priority of accessing the outer ring and shortcuts, it was come true that the wafer lot of the higher priority quickly reaches the destination. Considering the variability of service time of turntables, some queuing models which match system queuing feature were introduced to perform the analytical model. Under the same experiment conditions, through analyzing WIP values which were obtained by the analytical model and Arean simulation model, the accuracy of the proposed model was verified. Results show that absolute error is controlled fewer than 5% in any cases. Thus, the model performs well in performance analysis for continuous flow transporters of AMHSs.

出版日期: 2015-02-01
:  TP 29  
基金资助:

国家自然科学基金项目(61273035,71471135);国家“863”高技术研究发展计划项目(2009AA043000)

作者简介: 周炳海(1965—), 男, 教授, 博导, 从事离散制造系统维护、调度、建模与仿真的研究. E-mail: bhzhou@tongji.edu.cn
服务  
把本文推荐给朋友
加入引用管理器
E-mail Alert
RSS
作者相关文章  

引用本文:

周炳海, 陈锦祥, 赵猛. 基于晶圆优先级的连续型Interbay搬运系统性能分析[J]. 浙江大学学报(工学版), 10.3785/j.issn.1008-973X.2015.02.015.

ZHOU Bing-hai, CHEN Jin-xiang, ZHAO Meng. Performance analysis for continuous flow transporters of Interbay AMHS with priority rules. JOURNAL OF ZHEJIANG UNIVERSITY (ENGINEERING SCIENCE), 10.3785/j.issn.1008-973X.2015.02.015.

链接本文:

http://www.zjujournals.com/eng/CN/10.3785/j.issn.1008-973X.2015.02.015        http://www.zjujournals.com/eng/CN/Y2015/V49/I2/296

[1] JONATHAN D. 450 mm wafer transition needs collaboration and standards [J]. Solid State Technology, 2011, 54(6): 14-17.
[2] TOM J. ISMI 450 mm transition program update [J]. SEMICON Japan, 2008(12): 12-13.
[3] PETTINATO J S, PILLAI D. Technology decisions to minimize 450-mm wafer size transition risk [J]. IEEE Transactions on Semiconductor Manufacturing, 2005, 18(4): 501-509.
[4] ARDEZONNE F J. Handling the 450mm wafer with structural ceramics [J]. Solid State Technology, 2011, 54(7): 40-41.
[5] EMRAH Z, ROBERT W, CHAD B, et al. Modeling semiconductor factories for equipment and cycle time reduction opportunities [J]. Future Fab International, 2008, 24(4): 50-55.
[6] BATARSEH O G, NAZZAL D, YAN W. An interval-based meta-modeling approach to simulate material handling in semiconductor wafer fabs [J]. IEEE Transactions on Semiconductor Manufacturing, 2010, 23(4): 527-537.
[7] GOVIND N, ROEDER T M, SCHRUBEN L W. A simulationbased closed queuing network approximation of semiconductor automated material handling systems [J]. IEEE Transactions on Semiconductor Manufacturing, 2011, 24(1): 5-13.
[8] AGRAWAL G K, HERAGU S S. A survey of automated material handling systems in 300-mm Semiconductor Fabs [J]. IEEE Transactions on Semiconductor Manufacturing, 2006, 19(1): 112-120.
[9] YAVUZ A B, YING J H. Throughput performance analysis and machine layout for discrete-space closed-loop conveyors [J]. IIE Transactions, 2005, 37(1): 77-89.
[10] NAZZAL D, JOHNSON A. An analytical model for conveyor based AMHS in semiconductor wafer fabs [C]∥ Proceedings of the 40th Conference on Winter Simulation. Miami: IEEE, 2008: 2148-2155.
[11] NAZZAL D, JIMENEZ JA, CARLO H J, et al. An analytical model for conveyor-based automated material handling system with crossovers in semiconductor wafer fabs [J]. IEEE Transactions on Semiconductor Manufacturing, 2010, 23(3): 468-476.
[12] ZHOU Bing-bai, CHEN Jin-xiang. Queuing-based performance analytical model for continuous flow transporters of AMHS [J]. Journal of Donghua University:English Edition, 2013, 30(2): 90-95.
[13] 陈锦祥, 周炳海. 整体式晶圆连续自动物料搬运系统性能分析[J]. 计算机集成制造系统. 2013, 19 (6):1313-1320.
CHEN Jin-xiang, ZHOU Bing-bai. Performance analysis for continuous flow transporters of AMHS with united layout [J]. Computer Integrated Manufacturing Systems, 2013. 19(6): 1313-1320.
[14] NARAYAN B. An introduction to queuing theory: modeling and analysis in applications [M]. Boston, Massachusetts: Springer, 2008.
[15] MULLER R, ALEXOPOULOS C, MCGINNIS L F. Automatic generation of simulation models for semiconductor manufacturing [C]∥ Proceedings of the 2007 winter Simulation Conference. Washington DC: IEEE, 2007: 648-657.
[1] 任逸飞, 陆志强, 刘欣仪, 张猛. 考虑技能水平的多技能资源约束项目调度[J]. 浙江大学学报(工学版), 2017, 51(5): 1000-1006.
[2] 周炳海, 赵猛. 柔性Job Shops集成调度启发式算法[J]. 浙江大学学报(工学版), 2016, 50(6): 1073-1079.
[3] 赵立杰, 柴天佑, 袁德成, 刁晓坤. 增强操作工况识别可靠性的概率PLS-ELM方法[J]. J4, 2013, 47(10): 1747-1752.
[4] 孙跃, 赵志斌, 苏玉刚, 唐春森. 非接触电能传输系统参数非线性规划[J]. J4, 2013, 47(2): 353-360.
[5] 孟庆龙, 王元. 基于CFD的空间场温度系统建模与控制[J]. J4, 2012, 46(8): 1478-1484.
[6] 赵立杰, 汤健, 柴天佑. 基于选择性极限学习机集成的磨机负荷软测量[J]. J4, 2011, 45(12): 2088-2092.
[7] 夏明, 董亚波, 鲁东明. 无线传感网逐跳自适应FEC传输可靠性
保证方法
[J]. J4, 2011, 45(2): 273-279.
[8] 王建中, 金波, 鲁仁全. 基于渗漏模型的城市排水系统建模与分析[J]. J4, 2010, 44(7): 1382-1386.
[9] 汤健, 赵立杰, 岳恒, 柴天佑. 基于多源数据特征融合的球磨机负荷软测量[J]. J4, 2010, 44(7): 1406-1413.
[10] 孙宁, 张化光, 王智良. 不确定分数阶混沌系统的滑模投影同步[J]. J4, 2010, 44(7): 1288-1291.