光学工程 |
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球面干涉检测中改进的调整误差校正方法 |
王道档1, 杨甬英2, 邵卫红2, 陈晓钰2 |
1. 中国计量学院 计量测试工程学院,浙江 杭州 310018;
2. 浙江大学 现代光学仪器国家重点实验室,浙江 杭州 310027 |
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Improved method for misalignment calibration in
interferometric testing of spherical surface |
WANG Dao-dang1, YANG Yong-ying2, SHAO Wei-hong2, CHEN Xiao-yu2 |
1. College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China;
2. State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China |
引用本文:
王道档, 杨甬英, 邵卫红, 陈晓钰. 球面干涉检测中改进的调整误差校正方法[J]. J4, 2012, 46(10): 1932-1936.
WANG Dao-dang, YANG Yong-ying, SHAO Wei-hong, CHEN Xiao-yu. Improved method for misalignment calibration in
interferometric testing of spherical surface. J4, 2012, 46(10): 1932-1936.
链接本文:
http://www.zjujournals.com/eng/CN/10.3785/j.issn.1008-973X.2012.10.028
或
http://www.zjujournals.com/eng/CN/Y2012/V46/I10/1932
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[12] 王孝坤,王丽辉,张学军.干涉法实时测量浅度非球面技术[J].光学精密工程,2008,16(2): 184-189.
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