Optimization design of hollow cathode plasma discharge structure

doi:10.3785/j.issn. 1006-754X.2014.02.011

Chinese Journal of Engineering Design

2014, Vol. 21

Issue (2): 166-171 DOI: 10.3785/j.issn. 1006-754X.2014.02.011

Optimization design of hollow cathode plasma discharge structure

WEN Yi-fang¹， CHEN Xin²， WANG Hong-wei³

1.Suzhou Institute of Industrial Technology， Suzhou 215104， China；
2. School of Mechanical and Electrical Engineering， Soochow University， Suzhou 215021， China； 
3. OPS Plasma Technology Co.， Ltd.， Suzhou 215000， China

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Abstract Low temperature plasma can effectively clean and activate material surface without the disadvantages in liquid phase treatment such as environmental pollution， high energy consumption and high cost，so it can improve surface treatment quality by designing a appropriate plasma discharge structure. This paper built a mathematical model of CRFHCP hollow cathode plasma discharge. After analyzing key factors influencing the plasma discharge， various hollow cathode plasma discharge scheme with different electrode configuration mode， different sample position and different removed hollow cathode structure were designed. Through the determination of contact angle， surface energy calculation and SEM photos， the hydrophobic PP film morphology was characterized before and after plasma treatment under different plasma discharge scheme. According to the experimental results， there are smaller contact angle and larger surface energy in removed hollow cathode plasma discharge structure with radial nozzle than that by other ways. It is proved that the optimized CRFHCP hollow cathode plasma discharge structure can more effectively improve the hydrophilic of material surface.

Key words： low temperature plasma hollow cathode plasma plasma discharge structure optimization design

Published: 28 April 2014

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Cite this article:

WEN Yi-fang， CHEN Xin， WANG Hong-wei. Optimization design of hollow cathode plasma discharge structure. Chinese Journal of Engineering Design, 2014, 21(2): 166-171.

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https://www.zjujournals.com/gcsjxb/10.3785/j.issn. 1006-754X.2014.02.011 OR https://www.zjujournals.com/gcsjxb/Y2014/V21/I2/166

空心阴极等离子体放电结构的优化设计

低温等离子体表面处理可以有效克服液相处理法存在的环境污染、耗能大和成本高的缺点，对材料表面进行清洗、活化和接枝处理，而设计一个合理的低温等离子体放电结构能够较好地改进表面处理的质量．通过建立CRFHCP空心阴极等离子体放电的数学模型，分析影响低温等离子体放电的关键因素，并设计了不同电极配置方式、样品位置和不同远区空心阴极结构的众多方案．通过接触角测定、表面能计算、SEM照片等方式，对不同方案下处理前后的疏水性PP薄膜形态结构进行表征分析．实验结果发现：远区径向喷嘴式空心阴极等离子体放电结构处理的薄膜表面比其他处理方式具有较小的接触角和较大的表面能．这表明采用优化设计的CRFHCP空心阴极等离子体放电结构，可以较其他结构更为有效地改善材料表面的亲水性能．

关键词： 低温等离子体, 空心阴极, 等离子体放电结构, 优化设计

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