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| Design of PID vibration control system
for ultra-precision device |
| CHEN Ya-Liang, FU Long-Zhu, MEI De-Qing, CHEN Zi-Chen |
| Institute of Modern Manufacture Engineering，Zhejiang University，Hangzhou 310027，China |
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Abstract To keep the ultra-precision device from the micro-disturbance of environment，a structure and kinetic model of a vibration control system were established with a passive air-springwhich reduces vibrations of high-frequency area and a giant magnetostrictive actuator which reduces those of low-frequency area，which is imitative of the isolation mechanics and special organic texture of woodpecker’s brain．In consideration of complex vibration environment and nonlinear ultra-precision device，a closed loop PID active control system was adopted．The system was simulated by Matlab．Results of simulations show that the control system can effectively restrainthe disturbances whose frequency range form 0-100 Hz．It can be applied to the vibration isolation field of the ultra-precision measuring and manufacturing device．
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Published: 28 February 2003
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超精密装置PID振动控制系统的仿真研究
在仿生啄木鸟头部独特生物构造和隔振机理的基础上，采用主动隔振技术建立了超精密装置隔振系统结构及动力学模型． 结合超精密装置隔振系统的结构特点和性能要求，采用闭环PID主动控制系统，用Matlab软件进行了仿真分析．仿真分析结果表明，该振动控制系统宽频率范围内具有良好的减振效果，该系统可应用于超精密\测量、超精密制造设备的隔振领域．
关键词：
超精密装置,
仿生学,
主动振动控制,
PID控制
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