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工程设计学报
Chinese Journal of Engineering Design  2002, Vol. 9 Issue (4): 173-177    DOI:
    
Research situation and development of ultrasonic micro-motor in MEMS
 GUO  Ji-Feng1, LOU  Shao-Min2, LIU  Xiao1
(1．Electrical Engineering College，Zhejiang University，Hangzhou 310027，China；
2·Electromechanical Engineering Department，Zhejiang Science and Technology College，Hangzhou 31001 2，China
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Abstract  Micro—motor is the core of MEMS and SO ultrasonic micromotor becomes a new research center and relevant research develops quickly in recent years． Firstly，the paper analysizes the differences among ultrasonic motor，electrom agnetic motor and static motor；introduces the developm ent on ultrasonic micro-motors at home and abroad；points out two problems in the development——the vague research orientation and inadequently-solved key technique， the research orientation in further study，some key problems that m ust be solved and the application Dotential in civil and martial occasions，especially in m artial occasion；subsequently，points out m arket orientatlon and engineering application are crucial factors for the breakthrough of ultrasonic micro-motor and at the same time，sufficient attention researching unit are also very important for the motor in China．

Key words： micro-motor      micro-ultrasonic motor      ultrasonic motor      micro electromechanical system (MEMS)      micro systems      industrialization     
Published: 28 October 2002
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GUO Ji-Feng, LOU Shao-Min, LIU Xiao. Research situation and development of ultrasonic micro-motor in MEMS. Chinese Journal of Engineering Design, 2002, 9(4): 173-177.

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https://www.zjujournals.com/gcsjxb/     OR     https://www.zjujournals.com/gcsjxb/Y2002/V9/I4/173


微系统用超声微电机的研究现状和发展趋势

微电机是微机电系统(MEMS)的核心，超声微电机是一个新的发展方向．这几年发展十分迅速． 首先对比分析超声微电机与电磁型微电机和静电微电机的区别，对国内外现有的几种超声微电机及其发展趋势进行了介绍和分析，指出目前超声微电机发展存在研究定位不明和关键技术尚未完全解决两大问题。并提出了今后超声微电机发展的研究定位和必须解决的一些关键技术，其应用重点是军民两用，特别是军工． 最后，指出市场牵引和工程实现是超声微电机取得突破的关键因素的同时，政府、产业和研究单位各方面的重视和形成合力则是推进我国超声微电机研究和产业化的关键．

关键词： 微电机,  超声微电机,  超声波电机,  微电子机械系统,  微系统,  产业化 
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