[1] VANDAELE V, LAMBERT P, DELCHAMBRE A. Noncontact handling in microassenbly: acoustical levitation [J]. Precision Engineering, 2005, 29(4): 491-505.
[2] LI Xin, KAWASHIMA K, KAGAWA T. Analysis of vortex levitation [J]. Experimental Thermal and Fluid Science, 2008, 32(8): 1448-1454.
[3] 王涛,杨玉贵,彭光正.半导体及平板显示制造业中的空气非接触搬运技术[J].液晶与显示,2009,24(3): 404-408.
WANG Tao, YANG Yugui, PENG Guangzheng. Application of noncontact airsuspended movement technology in semiconductor and FPD production industry [J]. Chinese Journal of Liquid Crystals and Displays, 2009, 24(3): 404-408.
[4] CHANDRA C J G, SRINIVAS Y L, SEETHARAMU K N, et al. Investigation of air film conveyor pressurised through multiple holes [J]. Finite Elements in Analysis and Design, 1990, 6(3): 235-243.
[5] BHAT N, BARRANS S M. Design and test of a Pareto optimal flat pad aerostatic bearing [J]. Tribology International, 2008, 41(3): 181-188.
[6] FAN K C, HO C C, MOU J I. Development of a multiplemicrohole aerostatic air bearing system [J]. Journal of Micromechanics and Microengineering, 2002, 12(5): 636-643.
[7] LEE H G, LEE D G. Design of a large LCD panel handling air conveyor with minimum air consumption [J]. Mechanism and Machine Theory, 2006, 41(7): 790-806.
[8] AMANO K, YOSHIMOTO S, MIYATAKE M, et al. Basic investigation of noncontact transportation system for large TFTLCD glass sheet used in CCD inspection section [J]. Precision Engineering, 2011, 35(1): 58-64.
[9] FOURKA M, BONIS M. Comparison between externally pressurized gas thrust bearings with different orifice and porous feeding systems [J]. Wear, 1997, 210(1/2): 311-317.
[10] ZHONG Wei, TAO Guoliang, LI Xin, et al. Analysis of levitation using porous media [C]∥ Proceedings of SICE Annual Conference. Taibei: IEEE, 2010: 1658-1663.
[11] ZHONG Wei, TAO Guoliang, LI Xin, et al. Determination of flow rate characteristics of porous media using charge method [J]. Flow Measurement and Instrumentation, 2011, 22(3): 201-207.
[12] SPARROW E M, BEAVERS G S, HWANG I T. Effect of velocity slip on porouswalled squeeze films [J]. ASME Journal of Lubrication Technology, 1972, 94(3): 260-265.
[13] LUONG T S, POTZE W, POST J B, et al. Numerical and experimental analysis of aerostatic thrust bearings with porous restrictors [J]. Tribology International, 2004, 37(10): 825-832.
[14] TAYLOR G I. A model for the boundary condition of a porous material. part 1 [J]. Journal of Fluid Mechanics, 1971, 49(2): 319-326. |