[1] AZZAM R M A, BASHARA N M. Ellipsometry and Polarized Light [M]. New York: Elsevier NorthHolland, 1977: 1-20. [2] 程敏熙,何振江,黄佐华,等.分振幅斯托克斯参量的椭偏测厚方法[J].光电工程,2009,36(7): 100-106. CHENG Minxi, HE Zhenjiang, HUANG Zuohua. A method of ellipsometry based on stokes parameters with a divisionofamplitude polarimeter (DOAP) system [J]. OptoElectronic Engineering, 2009, 36(7): 100-106. [3] 徐均琪,冯小利.多层薄膜光学常数的椭偏法研究[J].光电工程,2009,36(2): 29-33. XU Junqi, FENG Xiaoli. Optical constants of multilayer thin films investigated by spectroscopic ellipsometr [J]. OptoElectronic Engineering, 2009, 36(2): 29-33. [4] 周庆初,徐乃欣.椭圆偏振参数的数据处理方法[J].薄膜科学与技术,1990,3(4): 71-77. ZHOU Qingchu, XU Naixin. Data processing methods for ellipsometric parameters [J]. Thin Film Science and Technology, 1990, 3(4): 71-77. [5] LUKES F. The accuracy of the measurement of the ellipsometric parameters Δ and Ψ[J]. Surface Science, 1969, 16: 74-84. [6] 王芳宁.提高椭偏测量中薄膜参数精度的研究[D].成都: 四川大学, 2004. WANG Fangning. Study on improving the precision of optical parameters of thin films in ellipsometry [D]. Chendu: Sichuan University, 2004. [7] 张宏琴,王海燕.椭偏仪的测量研究和误差分析[J].大学物理实验,2009,22(2): 79-83. ZHANG Hongqin, WANG Haiyan. Ellipsometer measurements and error analysis [J]. Physical Experiment of College, 2009, 22(2): 79-83. [8] 杨昌虎,杨力君.分光计的调整对椭圆偏振仪测量薄膜厚度和折射率的影响[J].实验技术与管理,2005, 22(11): 40-41, 118. YANG Changhu, YANG Lijun. Influence of spectrometer adjustments on measuring film thickness and refractive index on a ellipsometer [J]. Experimenta1Technology and Management, 2005, 22(11): 40-41, 118. [9] 杨昌虎,曾晓英,廖家欣.样品的倾斜度对椭偏法测量薄膜参数的影响[J].实验室研究与探索,2007,26(7): 20-22. YANG Changhu, ZENG Xiaoying, LIAO Jiaxin. Influence of sample inclination on measuring film parameter by ellipsometry method [J]. Research and Exploration in Laboratory,2007, 26(7): 20-22. [10] 华东师范大学数学系.数学分析(下册)[M].3版.北京:高等教育出版社,2007: 151-156. [11] 唐晋发,顾培夫,刘旭,等.现代光学薄膜技术[M].杭州:浙江大学出版社,2006: 415-419. [12] 谈恒英.光信息综合实验[M].杭州:浙江大学出版社,2003: 100-108. |