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浙江大学学报(工学版)
J4  2012, Vol. 46 Issue (11): 2116-2120    DOI: 10.3785/j.issn.1008-973X.2012.11.026
自动化技术、光学工程     
PZT移相和CCD非线性对高精度球面面形检测的影响
刘勇,沈亦兵,彭建华
浙江大学 光电信息工程学系,浙江 杭州 310027
Effect of PZT phase-shifting and CCD nonlinear on highprecision
testing of spherical surfaces
LIU Yong, SHEN Yi-bing, PENG Jian-hua
Department of Optical Engineering, Zhejiang University, Hangzhou 310027, China
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摘要：

为了提高球面面形的检测精度,对移相菲索干涉仪的球面测量方法中影响高精度球面面形检测的压电陶瓷晶体(PZT)移相误差和电荷耦合探测器(CCD)非线性误差进行探讨.通过理论分析和数值模拟的方法分别对PZT移相误差、CCD非线性误差进行具体分析,着重研究PZT移相误差和CCD非线性误差的综合影响.由五步移相算法,推导得出PZT和CCD的综合误差公式,对影响综合误差大小的主要因素如CCD二次非线性系数、条纹对比度和被检面曲率半径与口径的比值等进行分析.结果表明,提出的控制PZT和CCD综合误差影响的准则和相应的减小误差影响的方法,可以提高球面面形的检测精度.
Abstract:

To improve the measurement accuracy of spherical surfaces, the phase-shifting error of piezoelectric transducer(PZT) and the nonlinear error of charge coupled device(CCD), which both are the basic errors in the measuring principle of spherical surface testing based on phase-shifting Fizeau interferometer, impacting on high precision testing of spherical surfaces are discussed here. Then PZT phase-shifting error and CCD nonlinear error were analyzed, especially the combined effects of PZT phaseshifting error and CCD nonlinear error were emphatically studied through detailed analysis and simulation. The formula of combined error caused by PZT and CCD was given by the phase-shifting five-Bucket algorithm according to the major factor analysis such as: second-order nonlinear coefficient of CCD, fringe contrast and the ratio of test surface's radius of curvature to its diameter. Experiments show that the proposed criterions to control the error and some methods to minimize the error can improve the measurement accuracy of spherical surfaces．
出版日期: 2012-12-11
:  O 436.1 TH 744  
通讯作者: 沈亦兵，男，教授，博导.     E-mail: shenrr@mail.hz.zj.cn
作者简介: 刘勇（1987-），男，硕士生，主要从事光学球面面形高精度检测方面的研究工作.E-mail：cs10david@163.com
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引用本文:

刘勇,沈亦兵,彭建华. PZT移相和CCD非线性对高精度球面面形检测的影响[J]. J4, 2012, 46(11): 2116-2120.

LIU Yong, SHEN Yi-bing, PENG Jian-hua. Effect of PZT phase-shifting and CCD nonlinear on highprecision
testing of spherical surfaces. J4, 2012, 46(11): 2116-2120.

链接本文:

http://www.zjujournals.com/eng/CN/10.3785/j.issn.1008-973X.2012.11.026    或    http://www.zjujournals.com/eng/CN/Y2012/V46/I11/2116

［1］ BRUNNING H. Digital wavefront measuring interferometer for testsing optical surfaces and lenses ［J］. Applied Optics, 1974, 13(11):2693-2703．
［2］ MORGAN C J. Leastsquares estimation in phasemeasurement interferometry ［J］. Optics Letters, 1982, 7:368-370．
［3］ CHENG Y Y ,WYANT J C. Phase shifting calibration in phaseshiffting interferometry ［J］. Applied Optics, 1985, 24:3409-3052．
［4］ CREATH K. Error sources in phasemeasuring interferometry ［J］. Proceedings of SPIE, 1992, 1720:429-435．
［5］ BURGE J H. Fizeau interferometer for large convex surfaces ［C］∥Proceedings of SPIE 2536. Optical Manufacturing and Testing : ［s.n.］, 1995, 2536: 127-138．
［6］ HARIHARAN P, OREB B F, and EIJU T. Digital phaseshifting interferometry: a simple errorcompensating phase calculation algorithm［J］. Applied Optics, 1987,26:2504-2506．
［7］ 魏豪明,邢廷文,李云,等. 6328nm高精度移相菲佐干涉仪测量误差分析［J］. 激光与光电子学进展,2010,47(4)100-105．
WEI Haoming, XING Tingwen, LI Yun, et al. Measurement errors in 6328 nm high precision phaseshifting fizeau interferometer［J］. Laser & Optoelectronics Progress, 2010, 47(4):100-105．

［8］ 曾丹华,肖体乔,席再军,等. 相移干涉仪中探测器非线性误差及其补偿［J］. 光学学报,2006,26(9):2622-2625．
ZENG Danhua, XIAO Tiqiao, XI Zaijun, et al. Detector nonlinear error and compensation inphasestepping interferometry［J］. Acta Optica Sinica, 2006, 26(9):2622-2625．
［9］ GROOT P. Phaseshift calibration errors in interferometers with spherical fizeau cavities［J］. Applied Optics, 1995, 34(16):2856-2862．
［10］ MOORE R C, SLAYMAKER F H. Direct measurement of phase in a sphericalwave Fizeau interferometer ［J］. Applied Optics, 1980,19:2196-2200．
［11］ SCHREINER R, SCHWIDER J, LINDLEIN N, et al. Absolute testing of the reference of a Fizeau interferometer throuth even/odd decompositions ［J］. Applied Optics, 2008,47:6134-6141．
［12］ WANG D S, WANG K W, SHEN Y B, et al. Error analysis of spherical ultraprecision measurement ［C］∥ Proceedings of SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies. Optical Test and Measurement Technology and Equipment: ［s.n.］ 2010, 7656:76560O-1-76560O-7．
［13］ 彭建华,沈亦兵,汪凯巍,等. 两位置球面面形检测方法研究［J］. 光子学报,2011,40(9):1361-1365．
PENG Jianhua, SHEN Yibing, WANG Kaiwei, et al. Method of twoposition spherical testing ［J］. Acta Photonica Sinica, 2011, 40(9):1361-1365．
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