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浙江大学学报(工学版)
J4  2012, Vol. 46 Issue (4): 636-642    DOI: 10.3785/j.issn.1008-973X.2012.04.010
能源与机械工程     
非球面部分补偿检测系统的误差分析与处理
骆永洁, 杨甬英, 田超, 韦涛, 卓永模
浙江大学 现代光学仪器国家重点实验室,浙江 杭州 310027
Error analysis and processing of partial compensatory
aspheric testing system
LUO Yong-jie, YANG Yong-ying, TIAN Chao, WEI Tao, ZHUO Yong-mo
State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China
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摘要：

为了实现非球面通用化、高精度检测,提出非球面部分补偿法,并进行误差分析与处理.在光学设计软件ZEMAX中对部分补偿检测系统进行系统建模并优化,分析器件姿态误差及装调精度对重构非球面面形的影响.通过对系统误差的分析,提出基于系统建模的光线追迹与误差存储相结合的系统误差处理方法,将系统误差归为由系统建模得到检测光路的误差和由误差存储得到不含检测光路的干涉仪系统的误差.通过计算机仿真及实验证明,部分补偿检测系统采用该误差处理方法去除系统误差后,可以由逆向迭代优化重构(ROR)技术重构出更精确的非球面面形.将该非球面面形与采用无像差点法得到的面形对比,结果较吻合,均方根(RMS)精度接近0.02λ(λ为波长).
Abstract:

A partial compensatory aspheric testing system was proposed for general high-precision aspheric testing after extracting systematic error. System modeling was established with optimization, and the influence of surface figure and alignment precision on aspheric surface was analyzed in optical design software ZEMAX. By error analysis of aspheric testing system, the method of ray trace based on system modeling and error storage was employed to extract systematic error. Systematic error was categorized into two types, the error of testing path by ray trace in system modeling and the rest from the interferometer excluding testing path by the method of error storage. Computer simulation and experimental results show that aspheric surface is precisely reconstructed by revise iterative optimization reconstruction (ROR) after consideration of systematic error extracted by effective processing method. Comparison experiments showed that the reconstructed aspheric surface agreed well with the result of autocollimation method. The root mean square (RMS) value accuracy can reach 0.02λ (λ is wave).
出版日期: 2012-05-17
:  TH 741.3  
基金资助:

国家重大科技专项经费资助项目.
通讯作者: 杨甬英,女,教授,博导.     E-mail: chuyyy@hzcnc.com
作者简介: 骆永洁(1985—),女,硕士生,从事非球面检测的研究.E-mail: yjluo2008@gmail.com
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引用本文:

骆永洁, 杨甬英, 田超, 韦涛, 卓永模. 非球面部分补偿检测系统的误差分析与处理[J]. J4, 2012, 46(4): 636-642.

LUO Yong-jie, YANG Yong-ying, TIAN Chao, WEI Tao, ZHUO Yong-mo. Error analysis and processing of partial compensatory
aspheric testing system. J4, 2012, 46(4): 636-642.

链接本文:

http://www.zjujournals.com/eng/CN/10.3785/j.issn.1008-973X.2012.04.010    或    http://www.zjujournals.com/eng/CN/Y2012/V46/I4/636

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