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J4  2012, Vol. 46 Issue (4): 636-642    DOI: 10.3785/j.issn.1008-973X.2012.04.010
骆永洁, 杨甬英, 田超, 韦涛, 卓永模
浙江大学 现代光学仪器国家重点实验室,浙江 杭州 310027
Error analysis and processing of partial compensatory
aspheric testing system
LUO Yong-jie, YANG Yong-ying, TIAN Chao, WEI Tao, ZHUO Yong-mo
State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China
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A partial compensatory aspheric testing system was proposed for general high-precision aspheric testing after extracting systematic error. System modeling was established with optimization, and the influence of surface figure and alignment precision on aspheric surface was analyzed in optical design software ZEMAX. By error analysis of aspheric testing system, the method of ray trace based on system modeling and error storage was employed to extract systematic error. Systematic error was categorized into two types, the error of testing path by ray trace in system modeling and the rest from the interferometer excluding testing path by the method of error storage. Computer simulation and experimental results show that aspheric surface is precisely reconstructed by revise iterative optimization reconstruction (ROR) after consideration of systematic error extracted by effective processing method. Comparison experiments showed that the reconstructed aspheric surface agreed well with the result of autocollimation method. The root mean square (RMS) value accuracy can reach 0.02λ (λ is wave).

出版日期: 2012-05-17
:  TH 741.3  


通讯作者: 杨甬英,女,教授,博导.     E-mail:
作者简介: 骆永洁(1985—),女,硕士生,从事非球面检测的研究.E-mail:
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骆永洁, 杨甬英, 田超, 韦涛, 卓永模. 非球面部分补偿检测系统的误差分析与处理[J]. J4, 2012, 46(4): 636-642.

LUO Yong-jie, YANG Yong-ying, TIAN Chao, WEI Tao, ZHUO Yong-mo. Error analysis and processing of partial compensatory
aspheric testing system. J4, 2012, 46(4): 636-642.


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