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浙江大学学报(工学版)
J4  2010, Vol. 44 Issue (2): 392-397    DOI: 10.3785/j.issn.1008-973X.2010.02.033
机械工程     
基于光谱型白光干涉仪的绝对距离测试研究
薛晖, 倪肖勇, 沈伟东, 章岳光, 刘旭, 顾培夫
（浙江大学 现代光学仪器国家重点实验室,浙江 杭州 310027）
Absolute distance measurement with spectral domain white-light interferometer
XUE Hui, NI Xiao-yong, SHEN Wei-dong, ZHANG Yue-guang, LIU Xu, GU Pei-fu
(State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China)
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摘要：

采用微型光纤光谱仪记录宽波段(450～900 nm)下的光谱干涉图,提出一种解包络线的方法来提取相位主值,同时由总光程差与棱镜折射率成正比的关系进行相位解包裹.由线性关系的斜率和截距分别求解得到棱镜的等效厚度和两参考镜之间的绝对距离.利用该方法测试了参考镜在不同位置处的距离,结果与千分尺数值之间的偏差小于1%,同时获得了99.9%的线性度.还测试了BK7玻璃的厚度,与其他方法相比,其精度达0.21%.分析了影响测试精度的因素,并对测距范围进行了讨论.
Abstract:

A fiber-optic spectrometer was employed for recording spectral interferograms over a wide wavelength range (450 ～ 900 nm). A new method was presented for retrieving the wrapped phase function by the envelope method. The unwrapped phase was obtained by a simple procedure based on linear dependence of optical path difference between interferometer beams on the refractive index of optical elements. The effective thickness of the beam splitter was given by the slope of the linear dependence, and the absolute distance was determined by the intercept. The method was applied to measure the distances when displacing mirror to different positions. The measured results deviated less than 1% from those of vernier caliper and presented a linearity of 99.9%. The thickness of a BK7 glass plate was also measured. An accuracy of 0.21% was obtained compared with other methods. The reasons that affected the measurement accuracy were analyzed, and the range of measurable distance was discussed.
出版日期: 2010-03-09
:  TH 741.13  
基金资助:

国家自然科学基金资助项目（60708013）；中国博士后科学基金资助项目（20081463）.
通讯作者: 沈伟东，男，副研究员.     E-mail: adongszju@hotmail.com
作者简介: 薛晖（1981—），男，浙江余杭人，博士生，从事光学薄膜检测的研究.
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薛晖, 倪肖勇, 沈伟东, 等. 基于光谱型白光干涉仪的绝对距离测试研究[J]. J4, 2010, 44(2): 392-397.

XUE Hui, NI Xiao-Yong, CHEN Wei-Dong, et al. Absolute distance measurement with spectral domain white-light interferometer. J4, 2010, 44(2): 392-397.

链接本文:

http://www.zjujournals.com/eng/CN/10.3785/j.issn.1008-973X.2010.02.033    或    http://www.zjujournals.com/eng/CN/Y2010/V44/I2/392

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