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Front. Inform. Technol. Electron. Eng.  2013, Vol. 14 Issue (1): 65-74    DOI: 10.1631/jzus.C1200251
    
Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers
Jian-qiang Han, Ri-sheng Feng, Yan Li, Sen-lin Li, Qing Li
College of Mechanical & Electrical Engineering, China Jiliang University, Hangzhou 310018, China
Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers
Jian-qiang Han, Ri-sheng Feng, Yan Li, Sen-lin Li, Qing Li
College of Mechanical & Electrical Engineering, China Jiliang University, Hangzhou 310018, China
 全文: PDF 
摘要： This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by masked-maskless combined anisotropic etching. Four resonant beams are located at the surface of a silicon substrate, whereas the gravity centre of a proof mass lies within the neutral plane of four crab-leg supporting beams on the same substrate. Compared with early reported mechanical structures, the simple structure not only eliminates the bending moments caused by in-plane acceleration, and thereby avoiding the rotation of the proof mass, but also providing sufficiently small rigidity to X and Y axes accelerations, potentially leading to a large sensitivity for measuring the in-plane acceleration.
关键词： Resonant accelerometer;  Maskless etching;  Bulk micromachining technology;  Microelectromechanical system (MEMS);  Microsensor    
Abstract: This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by masked-maskless combined anisotropic etching. Four resonant beams are located at the surface of a silicon substrate, whereas the gravity centre of a proof mass lies within the neutral plane of four crab-leg supporting beams on the same substrate. Compared with early reported mechanical structures, the simple structure not only eliminates the bending moments caused by in-plane acceleration, and thereby avoiding the rotation of the proof mass, but also providing sufficiently small rigidity to X and Y axes accelerations, potentially leading to a large sensitivity for measuring the in-plane acceleration.
Key words: Resonant accelerometer    Maskless etching    Bulk micromachining technology    Microelectromechanical system (MEMS)    Microsensor
收稿日期: 2012-08-24 出版日期: 2013-01-03
CLC:  TP212  
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Jian-qiang Han
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Sen-lin Li
Qing Li

引用本文:

Jian-qiang Han, Ri-sheng Feng, Yan Li, Sen-lin Li, Qing Li. Microfabrication technology for non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers. Front. Inform. Technol. Electron. Eng., 2013, 14(1): 65-74.

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http://www.zjujournals.com/xueshu/fitee/CN/10.1631/jzus.C1200251    或    http://www.zjujournals.com/xueshu/fitee/CN/Y2013/V14/I1/65

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