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Front. Inform. Technol. Electron. Eng.  2013, Vol. 14 Issue (4): 264-273    DOI: 10.1631/jzus.C12MNT05
    
High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation
Jun Xu, Xin Li, Jin-hua Duan, Hai-bo Xu
College of Automation, Harbin University of Science and Technology, Harbin 150080, China; Computer Center, Harbin University of Science and Technology, Harbin 150080, China
High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation
Jun Xu, Xin Li, Jin-hua Duan, Hai-bo Xu
College of Automation, Harbin University of Science and Technology, Harbin 150080, China; Computer Center, Harbin University of Science and Technology, Harbin 150080, China
 全文: PDF 
摘要： This paper presents the design, fabrication, and characterization of a quartz tuning fork temperature sensor based on a new ZY-cut quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Design and performance analysis of the quartz tuning fork temperature sensor were conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor caused by an external temperature. Finite element method is used to analyze the vibratory modes and optimize the structure of the sensor. The sensor prototype was successfully fabricated and calibrated in operation from 0 to 100 °C with the thermo-sensitivity of 70×10?6/°C. Experimental results show that the sensor has high thermo-sensitivity, good stability, and good reproducibility. This work presents a high-precision low-power temperature sensor using the comprehensive thermal characterization of the ZY-cut quartz tuning fork resonator.
关键词： Tuning fork;  ZY-cut quartz;  Quartz micromachining;  Thermal sensing;  Temperature sensor    
Abstract: This paper presents the design, fabrication, and characterization of a quartz tuning fork temperature sensor based on a new ZY-cut quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Design and performance analysis of the quartz tuning fork temperature sensor were conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor caused by an external temperature. Finite element method is used to analyze the vibratory modes and optimize the structure of the sensor. The sensor prototype was successfully fabricated and calibrated in operation from 0 to 100 °C with the thermo-sensitivity of 70×10?6/°C. Experimental results show that the sensor has high thermo-sensitivity, good stability, and good reproducibility. This work presents a high-precision low-power temperature sensor using the comprehensive thermal characterization of the ZY-cut quartz tuning fork resonator.
Key words: Tuning fork    ZY-cut quartz    Quartz micromachining    Thermal sensing    Temperature sensor
收稿日期: 2012-10-08 出版日期: 2013-04-03
CLC:  TP212.1  
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Jun Xu
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Jun Xu, Xin Li, Jin-hua Duan, Hai-bo Xu. High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation. Front. Inform. Technol. Electron. Eng., 2013, 14(4): 264-273.

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http://www.zjujournals.com/xueshu/fitee/CN/10.1631/jzus.C12MNT05    或    http://www.zjujournals.com/xueshu/fitee/CN/Y2013/V14/I4/264

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