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一种联合调制反馈和温度补偿改善闭环MEMS电容式加速度计漂移的方法 |
Ming-jun Ma, Zhong-he Jin, Hui-jie Zhu |
Micro-Satellite Research Center, Zhejiang University, Hangzhou 310027, China |
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A combined modulated feedback and temperature compensation approach to improve bias drift of a closed-loop MEMS capacitive accelerometer |
Ming-jun Ma, Zhong-he Jin, Hui-jie Zhu |
Micro-Satellite Research Center, Zhejiang University, Hangzhou 310027, China |
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