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浙江大学学报(工学版)
J4  2013, Vol. 47 Issue (4): 720-727    DOI: 10.3785/j.issn.1008-973X.2013.04.024
电气与机械工程     
微/纳传动平台的位移耦合分析
林超, 陶友淘, 程凯, 俞松松, 刘垒
重庆大学 机械传动国家重点实验室,重庆 400030
Displacement coupling analysis of micro/nano transmission platform
LIN Chao, TAO You-tao, CHENG Kai, YU Song-song, LIU Lei
State Key Laboratory of Mechanical Transmission, Chongqing University, Chongqing 400030, China
 全文: PDF 
摘要：

根据机械设计、机械原理、有限元法及线性分析理论,建立微/纳传动平台的有限元模型,推导该平台的位移耦合计算公式,得到该平台沿各方向运动的解耦方程.结合耦合分析图,分析微/纳传动平台多尺度的位移耦合影响,获得该平台沿X、Y、Z轴移动以及绕X、Y轴转动的位移耦合规律,其中沿Z向运动引起的位移耦合最小,定位精度最高；沿X、Y向运动引起的位移耦合最大,对位移耦合影响较大的运动分支进行位移补偿.通过搭建的实验平台进行测试,将实验结果与有限元仿真和理论计算结果进行对比分析,结果基本一致,验证了该平台位移耦合分析方法的正确性.
关键词： 微/纳传动平台;  柔性板簧;  压电陶瓷;  位移耦合比;  有限元分析（FEA）    
Abstract:

The finite element model of micro/nano transmission platform was established according to mechanical design, mechanical principles, finite element method and linear analysis theories. The calculation formulas for displacement coupling of the platform were derived, and the decoupling equations along each moving directions were acquired. The multi-scale displacement coupling effect of micro/nano transmission platform was analyzed combined with coupling analysis diagrams. Then the displacement coupling regulations of moving along X, Y, Z axes and rotating around X, Y axes were acquired respectively. The caused coupling displacement along Z axis is minimum and the platform has the highest position accuracy. The responsive coupling displacements along X and Y axis are maximum. The displacement compensation was performed on the movement directions which have great coupling displacement. The experimental results accorded well with the finite element simulation and theoretical results through constructing experimental platform and testing, which verified the validity of the method.
Key words: micro/nano transmission platform    leaf spring    piezoelectric ceramics    displacement coupling ratio    finite element analysis (FEA)
出版日期: 2013-05-07
:  TH 139  
基金资助:

机械传动国家重点实验室科研业务费资助项目(SKLMT-ZZKT-2012MS05)|重庆大学机械传动国家重点实验室2008年度开放基金资助项目（SKLMT-KFKT-200806）.
作者简介: 林超(1958—),男,教授,博导，从事机械设计计算机辅助工程、微纳米传动系统的设计与分析、新型齿轮传动、精密传动等研究.E-mail: linchao@cqu.edu.cn
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引用本文:

林超, 陶友淘, 程凯, 俞松松, 刘垒. 微/纳传动平台的位移耦合分析[J]. J4, 2013, 47(4): 720-727.

LIN Chao, TAO You-tao, CHENG Kai, YU Song-song, LIU Lei. Displacement coupling analysis of micro/nano transmission platform. J4, 2013, 47(4): 720-727.

链接本文:

http://www.zjujournals.com/xueshu/eng/CN/10.3785/j.issn.1008-973X.2013.04.024    或    http://www.zjujournals.com/xueshu/eng/CN/Y2013/V47/I4/720

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