引用本文:

董健, 计时鸣, 王伟. 电容式硅微机械麦克风的结构与动态特性[J]. J4, 2009, 43(7): 1260-1268.

DONG Jian, JI Shi-Ming, WANG Wei. Structure and dynamic characteristics of silicon condenser micromachined microphone. J4, 2009, 43(7): 1260-1268.

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http://www.zjujournals.com/xueshu/eng/CN/    或    http://www.zjujournals.com/xueshu/eng/CN/Y2009/V43/I7/1260