Abstract Design of micro components and systems is very complex due to the com bination of
many different production technologies．This article describes a system for computer aided design
in microtechnology，which summarizes tools that simulate the technology．It stores their outputs
in a data model which contains the entire information about a micro system ．
Christoph Germer, Ulli Hansen, Hans-Jochamin Franke, Stephanus Buttgenbach. Computer aided design in microtechnology. Chinese Journal of Engineering Design, 2003, 10(2): 62-65.
