Abstract Electrostatic micro-pump based on MEMS is modeled by FEA. The modeling of coupled-field electrostatic micro-pump involved in multi-physics is reasonably simplified in simulation. In static analysis， small deflection theory of circular plate and electrostatic actuating theory are adopted to simulate electrostatic-structural coupled process. In modal analysis， harmonic response analysis and nonlinear transient dynamic analysis of pump membrane， the fluid in the pump is regarded as an additional mass acting on the pump membrane to approximately substitute the effect of fluid field on pump membrane， which reduces the amount of calculation and improves simulation efficiency.
LI Jun, YING Ji, ZHOU Liang-Xing. Modeling and simulation of electrostatic micropump based on MEMS. Chinese Journal of Engineering Design, 2009, 16(1): 63-67.
