Abstract Engineering coatings have been developed from single coating into multiple coatings and compound films. There are many applications of multiple coatings. The analysis of mechanical performances of these systems has significant impacts on MEMS technology and so on. The analytic solutions for multi-layed elastic solids have been presented by Fourier transformation based on Airy stress function approach. The comparison with results by ANSYS analysis shows that the solutions presented in this paper are accurate.
