Abstract In order to apply ultrasonic capturing techniques into M EM S and realize nondestructive and non-contact remote manipulation upon micro-component，this paper conducts theoretical research on radiation force acted on the micro-component in acoustic field．The results of computer simulation indicates that many factors，such as material，size of micro-component，density of medium ，acoustic parameters of ultrasonic etc ，willinfluence the radiation force on micro-component and it is feasible to implement manipulation on micro-component by exploiting the technology of acoustic standing waves．
YANG Ke-Ji, ZHANG Bao-Long. Theoretical research on ultrasonic radiation force of micro-components. Chinese Journal of Engineering Design, 2004, 11(6): 316-320.
