Effect of air slide-film damping on micromechanical sensor at atmosphere
DONG Lin-Xi1,2, JIAO Ji-Wei2, CHEN Yong2, WANG Yue-Lin1,2
1．Department of Information Science&Electronic Engineering，Zhejiang University，Hangzhou 310027，China；
2．State Key Laboratory of Transducer Technology，Shanghai Institute of M icrosystem and Information Technology，Chinese Academy of Sciences，Shanghai 200050，China
Abstract The authors design and fabricate a new bar capacitive micro-mechanical accelerometer．Its air slide—film damping is studied．The test results indicate that the quality factor Q of the bar structure accelerometer is 504．The bar capacitive testing structure having high Q can be used in the tesing mode of micromechanical gyroscope which is not necessary to be encapsulated in the vacuum ，can work at the atmosphere having high Q．The testing result of the gyroscope having bar structure indicate that the Q can reach 715 in the atmosphere environment．
DONG Lin-Xi, JIAO Ji-Wei, CHEN Yong, WANG Yue-Lin. Effect of air slide-film damping on micromechanical sensor at atmosphere. Chinese Journal of Engineering Design, 2003, 10(5): 271-274.
