优化设计 |
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雾化辅助CVD腔体的优化设计与实现 |
樊俊良( ),肖黎( ),罗月婷,陈刚,瞿小林,唐毅,龚恒翔 |
重庆理工大学 理学院,重庆 400054 |
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Optimization design and implementation of atomization assisted CVD cavity |
Junliang FAN( ),Li XIAO( ),Yueting LUO,Gang CHEN,Xiaolin QU,Yi TANG,Hengxiang GONG |
College of Science, Chongqing University of Technology, Chongqing 400054, China |
引用本文:
樊俊良,肖黎,罗月婷,陈刚,瞿小林,唐毅,龚恒翔. 雾化辅助CVD腔体的优化设计与实现[J]. 工程设计学报, 2023, 30(2): 182-188.
Junliang FAN,Li XIAO,Yueting LUO,Gang CHEN,Xiaolin QU,Yi TANG,Hengxiang GONG. Optimization design and implementation of atomization assisted CVD cavity[J]. Chinese Journal of Engineering Design, 2023, 30(2): 182-188.
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https://www.zjujournals.com/gcsjxb/CN/10.3785/j.issn.1006-754X.2023.00.018
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https://www.zjujournals.com/gcsjxb/CN/Y2023/V30/I2/182
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