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Front. Inform. Technol. Electron. Eng.  2013, Vol. 14 Issue (4): 264-273    DOI: 10.1631/jzus.C12MNT05
    
High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation
Jun Xu, Xin Li, Jin-hua Duan, Hai-bo Xu
College of Automation, Harbin University of Science and Technology, Harbin 150080, China; Computer Center, Harbin University of Science and Technology, Harbin 150080, China
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Abstract  This paper presents the design, fabrication, and characterization of a quartz tuning fork temperature sensor based on a new ZY-cut quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Design and performance analysis of the quartz tuning fork temperature sensor were conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor caused by an external temperature. Finite element method is used to analyze the vibratory modes and optimize the structure of the sensor. The sensor prototype was successfully fabricated and calibrated in operation from 0 to 100 °C with the thermo-sensitivity of 70×10?6/°C. Experimental results show that the sensor has high thermo-sensitivity, good stability, and good reproducibility. This work presents a high-precision low-power temperature sensor using the comprehensive thermal characterization of the ZY-cut quartz tuning fork resonator.

Key words： Tuning fork      ZY-cut quartz      Quartz micromachining      Thermal sensing      Temperature sensor     
Received: 08 October 2012      Published: 03 April 2013
CLC:  TP212.1  
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Jun Xu, Xin Li, Jin-hua Duan, Hai-bo Xu. High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation. Front. Inform. Technol. Electron. Eng., 2013, 14(4): 264-273.

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http://www.zjujournals.com/xueshu/fitee/10.1631/jzus.C12MNT05     OR     http://www.zjujournals.com/xueshu/fitee/Y2013/V14/I4/264


High-precision low-power quartz tuning fork temperature sensor with optimized resonance excitation

This paper presents the design, fabrication, and characterization of a quartz tuning fork temperature sensor based on a new ZY-cut quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Design and performance analysis of the quartz tuning fork temperature sensor were conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor caused by an external temperature. Finite element method is used to analyze the vibratory modes and optimize the structure of the sensor. The sensor prototype was successfully fabricated and calibrated in operation from 0 to 100 °C with the thermo-sensitivity of 70×10?6/°C. Experimental results show that the sensor has high thermo-sensitivity, good stability, and good reproducibility. This work presents a high-precision low-power temperature sensor using the comprehensive thermal characterization of the ZY-cut quartz tuning fork resonator.

关键词： Tuning fork,  ZY-cut quartz,  Quartz micromachining,  Thermal sensing,  Temperature sensor 
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