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Front. Inform. Technol. Electron. Eng.  2013, Vol. 14 Issue (4): 258-263    DOI: 10.1631/jzus.C12MNT04
    
Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology
Ji-jun Xiong, Shi-jun Zheng, Ying-ping Hong, Jun Li, Ying-lin Wang, Wei Wang, Qiu-lin Tan
Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Taiyuan 030051, China; MOE Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China; The Second Research Institute of China Electronics Technology Group Corporation, Taiyuan 030024, China
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Abstract  High temperature co-fired ceramics (HTCCs) have wide applications with stable mechanical properties, but they have not yet been used to fabricate sensors. By introducing the wireless telemetric sensor system and ceramic structure embedding a pressure-deformable cavity, the designed sensors made from HTCC materials (zirconia and 96% alumina) are fabricated, and their capacities for the pressure measurement are tested using a wireless interrogation method. Using the fabricated sensor, a study is conducted to measure the atmospheric pressure in a sealed vessel. The experimental sensitivity of the device is 2 Hz/Pa of zirconia and 1.08 Hz/Pa of alumina below 0.5 MPa with a readout distance of 2.5 cm. The described sensor technology can be applied for monitoring of atmospheric pressure to evaluate important component parameters in harsh environments.

Key words： High temperature co-fired ceramic (HTCC)      Wireless      Micro-electro-mechanical systems (MEMS)     
Received: 20 September 2012      Published: 03 April 2013
CLC:  TP212  
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Ji-jun Xiong
Shi-jun Zheng
Ying-ping Hong
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Ying-lin Wang
Wei Wang
Qiu-lin Tan
Cite this article:

Ji-jun Xiong, Shi-jun Zheng, Ying-ping Hong, Jun Li, Ying-lin Wang, Wei Wang, Qiu-lin Tan. Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology. Front. Inform. Technol. Electron. Eng., 2013, 14(4): 258-263.

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http://www.zjujournals.com/xueshu/fitee/10.1631/jzus.C12MNT04     OR     http://www.zjujournals.com/xueshu/fitee/Y2013/V14/I4/258


Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology

High temperature co-fired ceramics (HTCCs) have wide applications with stable mechanical properties, but they have not yet been used to fabricate sensors. By introducing the wireless telemetric sensor system and ceramic structure embedding a pressure-deformable cavity, the designed sensors made from HTCC materials (zirconia and 96% alumina) are fabricated, and their capacities for the pressure measurement are tested using a wireless interrogation method. Using the fabricated sensor, a study is conducted to measure the atmospheric pressure in a sealed vessel. The experimental sensitivity of the device is 2 Hz/Pa of zirconia and 1.08 Hz/Pa of alumina below 0.5 MPa with a readout distance of 2.5 cm. The described sensor technology can be applied for monitoring of atmospheric pressure to evaluate important component parameters in harsh environments.

关键词： High temperature co-fired ceramic (HTCC),  Wireless,  Micro-electro-mechanical systems (MEMS) 
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