A micromachining technique is presented for the fabrication of resin-bonded permanent magnets in the microscale. Magnetic paste is prepared from NdFeB powder and an epoxy resin, filled into lithographically defined photoresist molds or metal molds, and formed into resin-bonded magnets after curing at room temperature. A coercivity of 772.4 kA/m, a remanence of 0.27 T, and a maximum energy product of 22.6 kJ/m³ have been achieved in an NdFeB disk micromagnet with dimensions of Ф200 μm×70 μm. Based on the developed micro-patterning of resin-bonded magnets, a fully integrated electromagnetic vibration energy harvester has been designed and fabricated. The dimensions of the energy harvester are only 4.5 mm×4.5 mm×1.0 mm, and those of the micromagnet are 1.5 mm×1.5 mm×0.2 mm. This microfabrication technique can be used for producing permanent magnets tens or hundreds of micrometers in size for use in various magnetic devices.

关键词： NdFeB,  Micromagnet,  Resin-bonded,  Electromagnetic vibration energy harvester