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Front. Inform. Technol. Electron. Eng.  2010, Vol. 11 Issue (12): 1009-1015    DOI: 10.1631/jzus.C0910757
    
Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system
Xia Zhang, Hao Wang, Xu-dong Zheng, Shi-chang Hu, Zhong-he Jin
Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China, Beijing Institute of Aerospace Control Devices, Beijing 100854, China
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Abstract  We analyze the effects of possible noise sources on a fence structure micromachined capacitive accelerometer system by modeling and simulation to improve its performance. Simulation results show that a mismatch between the two initial sensing capacitors of the accelerometer or a mismatch between the two capacitance-voltage conversion circuits has a great effect on the output noise floor. When there is a serious mismatch, the noise induced by a sinusoidal carrier is the major noise source. When there is no or only a slight mismatch, the differential capacitance-voltage conversion circuits become the main noise source. The simulation results were validated by experiments and some effective approaches are proposed to improve the system resolution.

Key words： Capacitive accelerometer      Micro-electromechanical system (MEMS)      Noise      Modeling      Simulation     
Received: 10 December 2009      Published: 09 December 2010
CLC:  TN304.12  
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Xia Zhang
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Xu-dong Zheng
Shi-chang Hu
Zhong-he Jin
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Xia Zhang, Hao Wang, Xu-dong Zheng, Shi-chang Hu, Zhong-he Jin. Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system. Front. Inform. Technol. Electron. Eng., 2010, 11(12): 1009-1015.

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http://www.zjujournals.com/xueshu/fitee/10.1631/jzus.C0910757     OR     http://www.zjujournals.com/xueshu/fitee/Y2010/V11/I12/1009


Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system

We analyze the effects of possible noise sources on a fence structure micromachined capacitive accelerometer system by modeling and simulation to improve its performance. Simulation results show that a mismatch between the two initial sensing capacitors of the accelerometer or a mismatch between the two capacitance-voltage conversion circuits has a great effect on the output noise floor. When there is a serious mismatch, the noise induced by a sinusoidal carrier is the major noise source. When there is no or only a slight mismatch, the differential capacitance-voltage conversion circuits become the main noise source. The simulation results were validated by experiments and some effective approaches are proposed to improve the system resolution.

关键词： Capacitive accelerometer,  Micro-electromechanical system (MEMS),  Noise,  Modeling,  Simulation 
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