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Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system |
Xia Zhang, Hao Wang, Xu-dong Zheng, Shi-chang Hu, Zhong-he Jin |
Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China, Beijing Institute of Aerospace Control Devices, Beijing 100854, China |
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Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system |
Xia Zhang, Hao Wang, Xu-dong Zheng, Shi-chang Hu, Zhong-he Jin |
Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China, Beijing Institute of Aerospace Control Devices, Beijing 100854, China |
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