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Front. Inform. Technol. Electron. Eng.  2010, Vol. 11 Issue (12): 1009-1015    DOI: 10.1631/jzus.C0910757
    
Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system
Xia Zhang, Hao Wang, Xu-dong Zheng, Shi-chang Hu, Zhong-he Jin
Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China, Beijing Institute of Aerospace Control Devices, Beijing 100854, China
Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system
Xia Zhang, Hao Wang, Xu-dong Zheng, Shi-chang Hu, Zhong-he Jin
Department of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China, Beijing Institute of Aerospace Control Devices, Beijing 100854, China
 全文: PDF 
摘要： We analyze the effects of possible noise sources on a fence structure micromachined capacitive accelerometer system by modeling and simulation to improve its performance. Simulation results show that a mismatch between the two initial sensing capacitors of the accelerometer or a mismatch between the two capacitance-voltage conversion circuits has a great effect on the output noise floor. When there is a serious mismatch, the noise induced by a sinusoidal carrier is the major noise source. When there is no or only a slight mismatch, the differential capacitance-voltage conversion circuits become the main noise source. The simulation results were validated by experiments and some effective approaches are proposed to improve the system resolution.
关键词： Capacitive accelerometer;  Micro-electromechanical system (MEMS);  Noise;  Modeling;  Simulation    
Abstract: We analyze the effects of possible noise sources on a fence structure micromachined capacitive accelerometer system by modeling and simulation to improve its performance. Simulation results show that a mismatch between the two initial sensing capacitors of the accelerometer or a mismatch between the two capacitance-voltage conversion circuits has a great effect on the output noise floor. When there is a serious mismatch, the noise induced by a sinusoidal carrier is the major noise source. When there is no or only a slight mismatch, the differential capacitance-voltage conversion circuits become the main noise source. The simulation results were validated by experiments and some effective approaches are proposed to improve the system resolution.
Key words: Capacitive accelerometer    Micro-electromechanical system (MEMS)    Noise    Modeling    Simulation
收稿日期: 2009-12-10 出版日期: 2010-12-09
CLC:  TN304.12  
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Xia Zhang
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Xu-dong Zheng
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Zhong-he Jin

引用本文:

Xia Zhang, Hao Wang, Xu-dong Zheng, Shi-chang Hu, Zhong-he Jin. Modeling and noise analysis of a fence structure micromachined capacitive accelerometer system. Front. Inform. Technol. Electron. Eng., 2010, 11(12): 1009-1015.

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http://www.zjujournals.com/xueshu/fitee/CN/10.1631/jzus.C0910757    或    http://www.zjujournals.com/xueshu/fitee/CN/Y2010/V11/I12/1009

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