Research on structural design principle of anti-adhesion micro-gear under surface tension
ZHANG Ting1,2, LIU Shi-hao2, SHAN Yi-cai2,3, HU Zhong-hua4
1. College of Material Engineering, Nanjing Institute of Technology,Nanjing 211167, China； 2. College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China；
3. Department of Mechanical and Electrical Engineering, Nanjing College of Information Technology, Nanjing 210046, China;
4. Automation College, Nanjing University of Aeronautices an Astronautics, Nanjing 210016, China
Abstract Adhesion is the most common failure in micro-machine, and general micro-machines all try to avoid it. Surface tension is the most crucial reason causing adhesion. Deep research on physical principles of adhesion under surface tension was carried out. By taking polycrystalline silicon as an instance and considering its adhesion under surface tension, structure parameter design formula of anti-adhesion polycrystalline silicon micro-gear under surface tension was derived. The results show that the generation of adhesion of micro-gear has relation with material characteristics (elasticity, surface properties), micro-gear's structural parameters (radius, tooth width) and the gap between micro-gear and basic body．
ZHANG Ting, LIU Shi-hao, SHAN Yi-cai, HU Zhong-hua. Research on structural design principle of anti-adhesion micro-gear under surface tension. Chinese Journal of Engineering Design, 2009, 16(2): 112-116.
