Abstract Because micromanipulation stage was often woking in an environment with randomly changing temperature, the robust optimization design of the stage based on Taguchi method was proposed in order to reduce the influence of temperature on the performance variation of the micro-manipulation stage. Taking a novel one-dimentional micromanipulation stage as study object, the finite element method was applied to build the model of thermal error of the stage considering temperature effect. The relationship between thermal error and structure parameters was analyzed based on the model, and then the control factors were chosen, which had greater impact on the thermal errors of the stage. Taking the thermal error as smaller-the-better characteristic, the temperature and thermal expansion coeffcient as noise factors, the structual parameters as control factors, the optimal level of the control factors were determined by using the orthogonal experiment design and the main effect analysis. By comparing the mean and variance of the thermal error before and after optimization, the results showed that they were reduced by 16.03% and 12.07% respectively, and which illustrated the temperature effect of the stage could be reduced by the proposed robust optimization design.
HU Jun-feng, HAO Ya-zhou, ZHENG Chang-hu. Robust optimization design of a precise micromanipulation stage for reducing temperature effect. Chinese Journal of Engineering Design, 2015, 22(6): 581-588.