Abstract Piezoelectric micropump is divided into six functional blocks (or subsystems)：the bimorph subsystem ，the chamber，the inlet valve subsystem ，the outlet valve subsystem ，the inlet pipe subsystem and the outlet pipe subsystem．The models of the terminal behavior of the six subsystems were established，then the term inal behavior of the subsystems were analyzed．After these，the models were connected together as the model of the whole system．The behavior of the whole system can be obtained by analyzing the model．
CHEN Jian-Mei, YING Ji. Research on term inal behavior of piezoelectrical driven m icropump. Chinese Journal of Engineering Design, 2003, 10(4): 179-182.
