整机和系统设计 |
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基于模糊控制的HVPE生长设备温度控制系统 |
王超1, 孙文旭1, 马晓静1, 陈纪旸1, 栾义忠1, 马思乐1,2 |
1.山东大学 海洋研究院, 山东 青岛 266237 2.山东大学 控制科学与工程学院, 山东 济南 250061 |
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Temperature control system of HVPE growth equipment based on fuzzy control |
WANG Chao1, SUN Wen-xu1, MA Xiao-jing1, CHEN Ji-yang1, LUAN Yi-zhong1, MA Si-le1,2 |
1.Institute of Marine Science and Technology, Shandong University, Qingdao 266237, China 2.School of Control Science and Engineering, Shandong University, Jinan 250061, China |
引用本文:
王超, 孙文旭, 马晓静, 陈纪旸, 栾义忠, 马思乐. 基于模糊控制的HVPE生长设备温度控制系统[J]. 工程设计学报, 2020, 27(6): 765-770.
WANG Chao, SUN Wen-xu, MA Xiao-jing, CHEN Ji-yang, LUAN Yi-zhong, MA Si-le. Temperature control system of HVPE growth equipment based on fuzzy control. Chinese Journal of Engineering Design, 2020, 27(6): 765-770.
链接本文:
https://www.zjujournals.com/gcsjxb/CN/10.3785/j.issn.1006-754X.2020.00.083
或
https://www.zjujournals.com/gcsjxb/CN/Y2020/V27/I6/765
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