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ZJUS-A
Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering)  2006, Vol. 7 Issue (8 ): 19-    DOI: 10.1631/jzus.2006.A1436
    
Chemically processed Nb-doped SrTiO3 films and properties
YIN Ming-zhi
Applied Chemicals Department, Northwest Polytechnique University, Xi’an 710072, China
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Abstract  Homogeneous, crack-free SrNbxTi1−xO3 thin films on (110) silicon substrates were successfully fabricated by sol-gel processing. The optimum route and conditions were systematically investigated. Sr(OAc)2 glacial acetic acid solution, after being refluxed and reacted with tartrate, formed Sr(OAc)2(C4H6O6)2; Ti(OBu)4 formed Ti(OAc)4−x(AcAc)x after having the ligand partially exchanged with AcAc, while Nb(OC2H5)5 formed (OAc)2Nb(AcAc) (C4H6O6) by exchanging of ligand in glacial acetic acid with (CH3CO)2O. All the metal species after undergoing partial hydrolysis and polymerization with hydroxyl or oxygen, formed SrNbxTi1−xO3 cluster sol. Methyl cellulose (MCL) caused SrNbxTi1−xO3 sol to have polymeric structure and easily form films. SrNbxTi1−xO3 films with perovskite were subsequently formed after being annealed at 650~750 °C for 60 min in 25% N2+75% H2 (volume ratio) atmosphere. Resistivity of the SrNb0.1Ti0.9O3 films at room temperature was 64 μΩ∙cm, a particular T2 temperature dependence of the resistivity, from 25 K up to room temperature, was observed.

Key words： SrNbxTi1−xO3 (SNTO) film      Sol-gel technique      Donor-doping-semiconductor     
Received: 26 April 2006     
CLC:  TM215  
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YIN Ming-zhi
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YIN Ming-zhi. Chemically processed Nb-doped SrTiO3 films and properties. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2006, 7(8 ): 19-.

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http://www.zjujournals.com/xueshu/zjus-a/10.1631/jzus.2006.A1436     OR     http://www.zjujournals.com/xueshu/zjus-a/Y2006/V7/I8 /19

[1] Yin Ming-zhi, Yao Xi, ZHang Liang-ying. A novel fabrication of meso-porous silica film by sol-gol of TEOS[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2004, 5(4): 422-427.