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ZJUS-A
Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering)  2004, Vol. 5 Issue (4): 422-427    DOI: 10.1631/jzus.2004.0422
Chemical & Material Science     
A novel fabrication of meso-porous silica film by sol-gol of TEOS
Yin Ming-zhi, Yao Xi, ZHang Liang-ying
Electronic Materials Research Laboratory, Xi\'an Jiaotong University, Xi\'an 710049, China
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Abstract  A homogeneous crack-free nano- or meso-porous silica films on silicon was fabricated by colloidal silica sol derived by hydrolyzing tetraethyl orthosilicate (TEOS) catalyzing with (C4H9)4N+OH- in water medium. the solution with ratio of H2O/TEOS≥15, R4N+ and glycerol as templates, combining with the hydrolyzed intermediate, controlled the silica aggregating; the templated silica film with heterostructure was developed into homogeneous nano-porous then meso-porous silica films after being annealed from 750 °C to 850 °C; the formation mechanism of the porous silica films was discussed; morphologies of the silica films were characterized. the refractive indexes of the porous silica films were 1.256-1.458, the thermal conductivity < 0.7 W/m/K. The fabricating procedure and the sequence had not been reported before.

Key words： Tetraethyl orthosilicate (TEOS),Sol-gel technique,Porous silica film      Thermal conductivity     
Received: 07 May 2003     
CLC:  TB321  
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ZHang Liang-ying
Yin Ming-zhi
Yao Xi
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Yin Ming-zhi, Yao Xi, ZHang Liang-ying. A novel fabrication of meso-porous silica film by sol-gol of TEOS. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2004, 5(4): 422-427.

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http://www.zjujournals.com/xueshu/zjus-a/10.1631/jzus.2004.0422     OR     http://www.zjujournals.com/xueshu/zjus-a/Y2004/V5/I4/422

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